JPS62175071U - - Google Patents

Info

Publication number
JPS62175071U
JPS62175071U JP6204986U JP6204986U JPS62175071U JP S62175071 U JPS62175071 U JP S62175071U JP 6204986 U JP6204986 U JP 6204986U JP 6204986 U JP6204986 U JP 6204986U JP S62175071 U JPS62175071 U JP S62175071U
Authority
JP
Japan
Prior art keywords
positive
carbon positive
plasma
negative electrodes
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6204986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS644838Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6204986U priority Critical patent/JPS644838Y2/ja
Publication of JPS62175071U publication Critical patent/JPS62175071U/ja
Application granted granted Critical
Publication of JPS644838Y2 publication Critical patent/JPS644838Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6204986U 1986-04-23 1986-04-23 Expired JPS644838Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6204986U JPS644838Y2 (enrdf_load_stackoverflow) 1986-04-23 1986-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6204986U JPS644838Y2 (enrdf_load_stackoverflow) 1986-04-23 1986-04-23

Publications (2)

Publication Number Publication Date
JPS62175071U true JPS62175071U (enrdf_load_stackoverflow) 1987-11-06
JPS644838Y2 JPS644838Y2 (enrdf_load_stackoverflow) 1989-02-07

Family

ID=30895950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6204986U Expired JPS644838Y2 (enrdf_load_stackoverflow) 1986-04-23 1986-04-23

Country Status (1)

Country Link
JP (1) JPS644838Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS644838Y2 (enrdf_load_stackoverflow) 1989-02-07

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