JPS62192633U - - Google Patents

Info

Publication number
JPS62192633U
JPS62192633U JP8049386U JP8049386U JPS62192633U JP S62192633 U JPS62192633 U JP S62192633U JP 8049386 U JP8049386 U JP 8049386U JP 8049386 U JP8049386 U JP 8049386U JP S62192633 U JPS62192633 U JP S62192633U
Authority
JP
Japan
Prior art keywords
plasma
thin film
high frequency
frequency power
generate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8049386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8049386U priority Critical patent/JPS62192633U/ja
Publication of JPS62192633U publication Critical patent/JPS62192633U/ja
Pending legal-status Critical Current

Links

JP8049386U 1986-05-27 1986-05-27 Pending JPS62192633U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8049386U JPS62192633U (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8049386U JPS62192633U (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Publications (1)

Publication Number Publication Date
JPS62192633U true JPS62192633U (enrdf_load_stackoverflow) 1987-12-08

Family

ID=30931345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8049386U Pending JPS62192633U (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Country Status (1)

Country Link
JP (1) JPS62192633U (enrdf_load_stackoverflow)

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