JPS62192633U - - Google Patents
Info
- Publication number
- JPS62192633U JPS62192633U JP8049386U JP8049386U JPS62192633U JP S62192633 U JPS62192633 U JP S62192633U JP 8049386 U JP8049386 U JP 8049386U JP 8049386 U JP8049386 U JP 8049386U JP S62192633 U JPS62192633 U JP S62192633U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- thin film
- high frequency
- frequency power
- generate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
Description
第１図は本考案のプラズマＣＶＤ装置を示す説
明図、第２図は従来のプラズマＣＶＤ装置を示す
説明図である。
１，１０……反応室、２，１２……反応室支持
台、３……マツチングボツクス、４，１３……シ
ールド、７……ＲＦ導入管、８，１７……導体、
１１……整合手段。
FIG. 1 is an explanatory diagram showing a plasma CVD apparatus of the present invention, and FIG. 2 is an explanatory diagram showing a conventional plasma CVD apparatus. 1, 10... Reaction chamber, 2, 12... Reaction chamber support, 3... Matching box, 4, 13... Shield, 7... RF introduction tube, 8, 17... Conductor,
11... Matching means.
Claims (1)
つて薄膜を生成する反応室と、このプラズマ生成
用に供給する高周波電力とプラズマを生成させる
のに要する高周波電力を実質上一致させるための
整合手段とを同一の導電性筐体中に収容せしめた
ことを特徴とするプラズマＣＶＤ装置。 A reaction chamber into which a thin film generating gas is introduced to generate a thin film as plasma is generated, and a matching means for substantially matching the high frequency power supplied for plasma generation and the high frequency power required to generate plasma. A plasma CVD apparatus characterized in that the two are housed in the same conductive casing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8049386U JPS62192633U (en) | 1986-05-27 | 1986-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8049386U JPS62192633U (en) | 1986-05-27 | 1986-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192633U true JPS62192633U (en) | 1987-12-08 |
Family
ID=30931345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8049386U Pending JPS62192633U (en) | 1986-05-27 | 1986-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192633U (en) |
-
1986
- 1986-05-27 JP JP8049386U patent/JPS62192633U/ja active Pending
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