JPH0252252U

JPH0252252U -

Info

Publication number: JPH0252252U
Application number: JP13246688U
Authority: JP
Priority date: 1988-10-11
Filing date: 1988-10-11
Publication date: 1990-04-16

Description

[Brief explanation of drawings]

第１図は本考案のイオン源の縦断面図。第２図
ａはマイクロ波導入管の縦断面図、ｂはマイクロ
波導入管に於ける変換前の電気力線図、ｃはマイ
クロ波導入管に於ける変換後の電気力線図。第３
図は本考案のイオン源で多数枚の試料基板にイオ
ン照射するものを示す図。第４図は本考案のイオ
ン源のイオンビーム密度分布図。第５図は従来例
のマイクロ波イオン源の縦断面図。第６図は従来
例のマイクロ波イオン源の導波管内部の電気力線
図。第７図は従来のイオン源により多数枚の試料
基板にイオン照射するものを示す図。第８図は従
来のイオン源のイオンビーム密度分布図。１……イオン源チヤンバ、２……コイル、３，
４……誘電体、５……導波管、６……引出電極、
７……絶縁フランジ、８……引出電極、９……誘
電体、１０……磁力線、１１……電気力線、１２
……マイクロ波導入管、１３……デイスク、１４
……試料基板、１５……傾斜誘電体、１６……切
込み、２０……マイクロ波発生器、２１……端板
、２６……加速電極、２７……減速電極。 FIG. 1 is a longitudinal cross-sectional view of the ion source of the present invention. FIG. 2a is a longitudinal sectional view of the microwave introduction tube, b is an electric force line diagram before conversion in the microwave introduction tube, and FIG. 2c is an electric force line diagram after conversion in the microwave introduction tube. Third
The figure shows an ion source of the present invention that irradiates multiple sample substrates with ions. FIG. 4 is an ion beam density distribution diagram of the ion source of the present invention. FIG. 5 is a longitudinal sectional view of a conventional microwave ion source. FIG. 6 is a diagram of electric lines of force inside a waveguide of a conventional microwave ion source. FIG. 7 is a diagram showing ion irradiation onto a large number of sample substrates using a conventional ion source. FIG. 8 is an ion beam density distribution diagram of a conventional ion source. 1...Ion source chamber, 2...Coil, 3,
4... dielectric, 5... waveguide, 6... extraction electrode,
7... Insulating flange, 8... Extraction electrode, 9... Dielectric, 10... Lines of magnetic force, 11... Lines of electric force, 12
...Microwave introduction tube, 13...Disk, 14
... Sample substrate, 15 ... Inclined dielectric, 16 ... Notch, 20 ... Microwave generator, 21 ... End plate, 26 ... Acceleration electrode, 27 ... Deceleration electrode.

補正平１．１．３０図面の簡単な説明を次のように補正する。明細書第１６頁第２０行目「ｂ」とあるのを「
第２図ｂ」と訂正する。明細書第１７頁第２行目「ｃ」とあるのを「第
２図ｃ」と訂正する。明細書第１７頁第１５行目と同頁１６行目のあ
いだに「第９図は多数の基板を配置したデイスク
の平面図。」という文を挿入する。Amendment 1.1.30 Hei 1. The brief description of the drawing is amended as follows. The ``b'' on page 16, line 20 of the specification is changed to ``
Figure 2b” is corrected. The text "c" in the second line of page 17 of the specification is corrected to "Figure 2 c." The following sentence is inserted between the 15th line of page 17 of the specification and the 16th line of the same page: ``Figure 9 is a plan view of a disk on which a large number of substrates are arranged.''

Claims

[Scope of utility model registration request]

An ion source chamber 1 that forms a cylindrical space that can be evacuated and ionizes introduced gas.
a microwave generator 20 for supplying microwaves to the ion source chamber 1; and a coil disposed around the ion source chamber 1 for generating an axial magnetic field such that the cyclotron frequency of the electrons is at least approximately equal to the microwave frequency. 2, a waveguide 5 that guides microwaves from the microwave generator 20, and a cylindrical waveguide 5 connected to the waveguide 5 via an insulating flange 7 and inserted onto the central axis of the ion source chamber 1. a microwave introduction tube 12; a cylindrical dielectric 9 provided near the end of the microwave introduction tube 12 for introducing microwaves into the ion source chamber 1; and a cylindrical dielectric 9 provided near the end of the microwave introduction tube 12; The metal end plate 21 provided and the ion source chamber 1
The annular extraction electrode 8 _provided at the outlet of the An ion source characterized by comprising: a tilted dielectric material 15 that converts linearly polarized waves into circularly polarized waves and creates a TE ₀₁ mode.