JPS6217484Y2 - - Google Patents

Info

Publication number
JPS6217484Y2
JPS6217484Y2 JP19399882U JP19399882U JPS6217484Y2 JP S6217484 Y2 JPS6217484 Y2 JP S6217484Y2 JP 19399882 U JP19399882 U JP 19399882U JP 19399882 U JP19399882 U JP 19399882U JP S6217484 Y2 JPS6217484 Y2 JP S6217484Y2
Authority
JP
Japan
Prior art keywords
container
substrate
etching
heated
eddy current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19399882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59100856U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19399882U priority Critical patent/JPS59100856U/ja
Publication of JPS59100856U publication Critical patent/JPS59100856U/ja
Application granted granted Critical
Publication of JPS6217484Y2 publication Critical patent/JPS6217484Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP19399882U 1982-12-23 1982-12-23 基板の加工装置 Granted JPS59100856U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19399882U JPS59100856U (ja) 1982-12-23 1982-12-23 基板の加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19399882U JPS59100856U (ja) 1982-12-23 1982-12-23 基板の加工装置

Publications (2)

Publication Number Publication Date
JPS59100856U JPS59100856U (ja) 1984-07-07
JPS6217484Y2 true JPS6217484Y2 (cs) 1987-05-06

Family

ID=30417111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19399882U Granted JPS59100856U (ja) 1982-12-23 1982-12-23 基板の加工装置

Country Status (1)

Country Link
JP (1) JPS59100856U (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2740670B2 (ja) * 1989-03-01 1998-04-15 日本電信電話株式会社 エッチング方法

Also Published As

Publication number Publication date
JPS59100856U (ja) 1984-07-07

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