JPS62172128A - クリ−ンル−ムにおける偏流防止機構 - Google Patents

クリ−ンル−ムにおける偏流防止機構

Info

Publication number
JPS62172128A
JPS62172128A JP61014978A JP1497886A JPS62172128A JP S62172128 A JPS62172128 A JP S62172128A JP 61014978 A JP61014978 A JP 61014978A JP 1497886 A JP1497886 A JP 1497886A JP S62172128 A JPS62172128 A JP S62172128A
Authority
JP
Japan
Prior art keywords
air
clean room
suction port
floor
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61014978A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245095B2 (enrdf_load_stackoverflow
Inventor
Koichi Matsuda
松田　弘一
Satoru Hasegawa
悟 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Plant Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Engineering and Construction Co Ltd filed Critical Hitachi Plant Engineering and Construction Co Ltd
Priority to JP61014978A priority Critical patent/JPS62172128A/ja
Publication of JPS62172128A publication Critical patent/JPS62172128A/ja
Publication of JPH0245095B2 publication Critical patent/JPH0245095B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP61014978A 1986-01-27 1986-01-27 クリ−ンル−ムにおける偏流防止機構 Granted JPS62172128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61014978A JPS62172128A (ja) 1986-01-27 1986-01-27 クリ−ンル−ムにおける偏流防止機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61014978A JPS62172128A (ja) 1986-01-27 1986-01-27 クリ−ンル−ムにおける偏流防止機構

Publications (2)

Publication Number Publication Date
JPS62172128A true JPS62172128A (ja) 1987-07-29
JPH0245095B2 JPH0245095B2 (enrdf_load_stackoverflow) 1990-10-08

Family

ID=11876062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61014978A Granted JPS62172128A (ja) 1986-01-27 1986-01-27 クリ−ンル−ムにおける偏流防止機構

Country Status (1)

Country Link
JP (1) JPS62172128A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0245095B2 (enrdf_load_stackoverflow) 1990-10-08

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