JPS6217132U - - Google Patents
Info
- Publication number
- JPS6217132U JPS6217132U JP9331686U JP9331686U JPS6217132U JP S6217132 U JPS6217132 U JP S6217132U JP 9331686 U JP9331686 U JP 9331686U JP 9331686 U JP9331686 U JP 9331686U JP S6217132 U JPS6217132 U JP S6217132U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- electron beam
- secondary electrons
- integrated
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 230000007547 defect Effects 0.000 claims description 2
- 238000013500 data storage Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9331686U JPS6217132U (pt) | 1986-06-20 | 1986-06-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9331686U JPS6217132U (pt) | 1986-06-20 | 1986-06-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6217132U true JPS6217132U (pt) | 1987-02-02 |
Family
ID=30955801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9331686U Pending JPS6217132U (pt) | 1986-06-20 | 1986-06-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6217132U (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6427125U (pt) * | 1987-07-24 | 1989-02-16 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53135260A (en) * | 1977-04-30 | 1978-11-25 | Hitachi Ltd | Sample stage of e lectron microscope or the like |
JPS5693339A (en) * | 1979-12-27 | 1981-07-28 | Fujitsu Ltd | Function test device of integrated circuit |
-
1986
- 1986-06-20 JP JP9331686U patent/JPS6217132U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53135260A (en) * | 1977-04-30 | 1978-11-25 | Hitachi Ltd | Sample stage of e lectron microscope or the like |
JPS5693339A (en) * | 1979-12-27 | 1981-07-28 | Fujitsu Ltd | Function test device of integrated circuit |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6427125U (pt) * | 1987-07-24 | 1989-02-16 |
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