JPS53135260A - Sample stage of e lectron microscope or the like - Google Patents

Sample stage of e lectron microscope or the like

Info

Publication number
JPS53135260A
JPS53135260A JP5029077A JP5029077A JPS53135260A JP S53135260 A JPS53135260 A JP S53135260A JP 5029077 A JP5029077 A JP 5029077A JP 5029077 A JP5029077 A JP 5029077A JP S53135260 A JPS53135260 A JP S53135260A
Authority
JP
Japan
Prior art keywords
sample
sample stage
lectron
microscope
lectron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5029077A
Other languages
Japanese (ja)
Inventor
Yoshihisa Namikawa
Naotake Saito
Koji Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5029077A priority Critical patent/JPS53135260A/en
Publication of JPS53135260A publication Critical patent/JPS53135260A/en
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To improve the operation with the number of times of sample replacement reduced and to lessen contamination of a sample chamber, sample, etc., due to a vacuum leak, by unitedly holding a plural number of sample desks and the whole being made detachable to a sample fine adjustment device.
COPYRIGHT: (C)1978,JPO&Japio
JP5029077A 1977-04-30 1977-04-30 Sample stage of e lectron microscope or the like Pending JPS53135260A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5029077A JPS53135260A (en) 1977-04-30 1977-04-30 Sample stage of e lectron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5029077A JPS53135260A (en) 1977-04-30 1977-04-30 Sample stage of e lectron microscope or the like

Publications (1)

Publication Number Publication Date
JPS53135260A true JPS53135260A (en) 1978-11-25

Family

ID=12854774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5029077A Pending JPS53135260A (en) 1977-04-30 1977-04-30 Sample stage of e lectron microscope or the like

Country Status (1)

Country Link
JP (1) JPS53135260A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58178948A (en) * 1982-04-12 1983-10-20 Shimadzu Corp Sampling device for electron-ray radiating type analyzer
JPS5975551A (en) * 1982-10-22 1984-04-28 Hitachi Ltd Mass spectrograph
JPS6217132U (en) * 1986-06-20 1987-02-02

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58178948A (en) * 1982-04-12 1983-10-20 Shimadzu Corp Sampling device for electron-ray radiating type analyzer
JPS5975551A (en) * 1982-10-22 1984-04-28 Hitachi Ltd Mass spectrograph
JPH0354428B2 (en) * 1982-10-22 1991-08-20
JPS6217132U (en) * 1986-06-20 1987-02-02

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