JPS5297785A - Ion source device - Google Patents

Ion source device

Info

Publication number
JPS5297785A
JPS5297785A JP1405376A JP1405376A JPS5297785A JP S5297785 A JPS5297785 A JP S5297785A JP 1405376 A JP1405376 A JP 1405376A JP 1405376 A JP1405376 A JP 1405376A JP S5297785 A JPS5297785 A JP S5297785A
Authority
JP
Japan
Prior art keywords
source device
ion source
field
equipping
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1405376A
Other languages
Japanese (ja)
Other versions
JPS5843862B2 (en
Inventor
Tomoji Niina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51014053A priority Critical patent/JPS5843862B2/en
Publication of JPS5297785A publication Critical patent/JPS5297785A/en
Publication of JPS5843862B2 publication Critical patent/JPS5843862B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: To simplify the construction of a composite ion source device of field ionization, field dissociation and electron impingement by equipping a specimen holder and an emitter to the same probe.
COPYRIGHT: (C)1977,JPO&Japio
JP51014053A 1976-02-13 1976-02-13 ion source device Expired JPS5843862B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51014053A JPS5843862B2 (en) 1976-02-13 1976-02-13 ion source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51014053A JPS5843862B2 (en) 1976-02-13 1976-02-13 ion source device

Publications (2)

Publication Number Publication Date
JPS5297785A true JPS5297785A (en) 1977-08-16
JPS5843862B2 JPS5843862B2 (en) 1983-09-29

Family

ID=11850335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51014053A Expired JPS5843862B2 (en) 1976-02-13 1976-02-13 ion source device

Country Status (1)

Country Link
JP (1) JPS5843862B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58204462A (en) * 1982-05-22 1983-11-29 Shimadzu Corp Ion source device in mass spectrometer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60231564A (en) * 1984-05-02 1985-11-18 Kyokuto Diecast Kk Die for casting die cast product having middle recess in bore

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5250789U (en) * 1975-10-09 1977-04-11

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5250789B2 (en) * 1973-11-09 1977-12-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5250789U (en) * 1975-10-09 1977-04-11

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58204462A (en) * 1982-05-22 1983-11-29 Shimadzu Corp Ion source device in mass spectrometer
JPH0232749B2 (en) * 1982-05-22 1990-07-23 Shimadzu Corp

Also Published As

Publication number Publication date
JPS5843862B2 (en) 1983-09-29

Similar Documents

Publication Publication Date Title
JPS5343594A (en) Ion source for chemical ionization
JPS5297785A (en) Ion source device
JPS5333689A (en) Composite ion source for mass spectrometer
JPS5287985A (en) Plasma etching method
JPS529366A (en) Sample equipment for electron microscopes, etc
JPS5271972A (en) Acceleration tube
JPS5327485A (en) Mass analyzer
JPS529491A (en) Internal electrode
JPS5222473A (en) Panel measuring device
JPS5438188A (en) Ion source apparatus
JPS5230263A (en) Cold trap device
JPS5221574A (en) Vacuum multiplying force device
JPS5358769A (en) Ion injector
JPS5255589A (en) Ion source for common use in chemical ionization and electron impulsiv e ionization
JPS5434172A (en) Electromagnetic-shielding dust-proof constant-temperature chamber
JPS5274800A (en) Multistepped accelerator
JPS52154691A (en) Ion source device
JPS53131893A (en) Ion source
JPS52122461A (en) Electronic microscope
JPS5368328A (en) Electron advance device
JPS51131688A (en) Test gas generating material for gas alarm
JPS5284793A (en) Ion surce device of mass spectrometer
JPS5418679A (en) Electron impact type ion source device
JPS51113567A (en) Cathode ray brightness examination unit
JPS51144171A (en) Position indicator for electron microscope