JPS5426665A - Carrier for test piece for electron beam exposure unit - Google Patents
Carrier for test piece for electron beam exposure unitInfo
- Publication number
- JPS5426665A JPS5426665A JP9183877A JP9183877A JPS5426665A JP S5426665 A JPS5426665 A JP S5426665A JP 9183877 A JP9183877 A JP 9183877A JP 9183877 A JP9183877 A JP 9183877A JP S5426665 A JPS5426665 A JP S5426665A
- Authority
- JP
- Japan
- Prior art keywords
- test piece
- carrier
- electron beam
- exposure unit
- beam exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To make easy the adjustment for carrying of test piece and to reduce drift of test piece with less thermal change, by providing the test piece carrying set using air bearings beneath the test piece chamber and by making the member linking the carrying set with the test piece support stand in the test piece chamber parallel with the light axis.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9183877A JPS5426665A (en) | 1977-07-30 | 1977-07-30 | Carrier for test piece for electron beam exposure unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9183877A JPS5426665A (en) | 1977-07-30 | 1977-07-30 | Carrier for test piece for electron beam exposure unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5426665A true JPS5426665A (en) | 1979-02-28 |
Family
ID=14037720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9183877A Pending JPS5426665A (en) | 1977-07-30 | 1977-07-30 | Carrier for test piece for electron beam exposure unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5426665A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0472612A (en) * | 1990-07-12 | 1992-03-06 | Fujitsu Ltd | Electron beam exposure device |
-
1977
- 1977-07-30 JP JP9183877A patent/JPS5426665A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0472612A (en) * | 1990-07-12 | 1992-03-06 | Fujitsu Ltd | Electron beam exposure device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5426665A (en) | Carrier for test piece for electron beam exposure unit | |
JPS51135529A (en) | Ophthalmofundus photographing device with an anterior eye illumination system | |
JPS5313871A (en) | Color purity detector for color brown tube | |
JPS51132757A (en) | Optical observation device | |
JPS53126262A (en) | Molecular beam epitaxial growth apparatus | |
JPS53107268A (en) | Exposing method for fluorescent screen | |
JPS5427844A (en) | Stage apparatus | |
JPS53133067A (en) | Potential difference measuring device | |
JPS534419A (en) | Pick up unit | |
CH632375B (en) | WATCH BOX. | |
JPS548598A (en) | Paper leaves detector | |
JPS53143289A (en) | Semiconductor radiation measuring instrument | |
JPS524854A (en) | Objective=lens used for microscope | |
JPS5229348A (en) | Umbrella | |
JPS527667A (en) | Porous electro-potical body | |
JPS5411678A (en) | Electron ray unit | |
JPS5357964A (en) | Color braun tube | |
JPS53117459A (en) | Electron beam exposure apparatus | |
JPS5399899A (en) | Smoke sensor | |
JPS5290296A (en) | Display lamp with solar cell | |
JPS5238254A (en) | Optical regulating device | |
JPS53100249A (en) | Exposure optical system for multichromatic electrocopying machine | |
JPS51148452A (en) | Pattern defects detector | |
JPS5426640A (en) | Control system of hierarchy computer | |
JPS5420686A (en) | Photoelectric transducing circuit |