JPS5426665A - Carrier for test piece for electron beam exposure unit - Google Patents

Carrier for test piece for electron beam exposure unit

Info

Publication number
JPS5426665A
JPS5426665A JP9183877A JP9183877A JPS5426665A JP S5426665 A JPS5426665 A JP S5426665A JP 9183877 A JP9183877 A JP 9183877A JP 9183877 A JP9183877 A JP 9183877A JP S5426665 A JPS5426665 A JP S5426665A
Authority
JP
Japan
Prior art keywords
test piece
carrier
electron beam
exposure unit
beam exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9183877A
Other languages
Japanese (ja)
Inventor
Shisei Miyazaki
Akio Mikajiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9183877A priority Critical patent/JPS5426665A/en
Publication of JPS5426665A publication Critical patent/JPS5426665A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To make easy the adjustment for carrying of test piece and to reduce drift of test piece with less thermal change, by providing the test piece carrying set using air bearings beneath the test piece chamber and by making the member linking the carrying set with the test piece support stand in the test piece chamber parallel with the light axis.
COPYRIGHT: (C)1979,JPO&Japio
JP9183877A 1977-07-30 1977-07-30 Carrier for test piece for electron beam exposure unit Pending JPS5426665A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9183877A JPS5426665A (en) 1977-07-30 1977-07-30 Carrier for test piece for electron beam exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9183877A JPS5426665A (en) 1977-07-30 1977-07-30 Carrier for test piece for electron beam exposure unit

Publications (1)

Publication Number Publication Date
JPS5426665A true JPS5426665A (en) 1979-02-28

Family

ID=14037720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9183877A Pending JPS5426665A (en) 1977-07-30 1977-07-30 Carrier for test piece for electron beam exposure unit

Country Status (1)

Country Link
JP (1) JPS5426665A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0472612A (en) * 1990-07-12 1992-03-06 Fujitsu Ltd Electron beam exposure device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0472612A (en) * 1990-07-12 1992-03-06 Fujitsu Ltd Electron beam exposure device

Similar Documents

Publication Publication Date Title
JPS5426665A (en) Carrier for test piece for electron beam exposure unit
JPS51135529A (en) Ophthalmofundus photographing device with an anterior eye illumination system
JPS5313871A (en) Color purity detector for color brown tube
JPS51132757A (en) Optical observation device
JPS53126262A (en) Molecular beam epitaxial growth apparatus
JPS53107268A (en) Exposing method for fluorescent screen
JPS5427844A (en) Stage apparatus
JPS53133067A (en) Potential difference measuring device
JPS534419A (en) Pick up unit
CH632375B (en) WATCH BOX.
JPS548598A (en) Paper leaves detector
JPS53143289A (en) Semiconductor radiation measuring instrument
JPS524854A (en) Objective=lens used for microscope
JPS5229348A (en) Umbrella
JPS527667A (en) Porous electro-potical body
JPS5411678A (en) Electron ray unit
JPS5357964A (en) Color braun tube
JPS53117459A (en) Electron beam exposure apparatus
JPS5399899A (en) Smoke sensor
JPS5290296A (en) Display lamp with solar cell
JPS5238254A (en) Optical regulating device
JPS53100249A (en) Exposure optical system for multichromatic electrocopying machine
JPS51148452A (en) Pattern defects detector
JPS5426640A (en) Control system of hierarchy computer
JPS5420686A (en) Photoelectric transducing circuit