JPS53117459A - Electron beam exposure apparatus - Google Patents
Electron beam exposure apparatusInfo
- Publication number
- JPS53117459A JPS53117459A JP3238877A JP3238877A JPS53117459A JP S53117459 A JPS53117459 A JP S53117459A JP 3238877 A JP3238877 A JP 3238877A JP 3238877 A JP3238877 A JP 3238877A JP S53117459 A JPS53117459 A JP S53117459A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure apparatus
- beam exposure
- expansion
- obviate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To obviate the production of errors in exposure accuracy despite expansion or contraction of a specimen chamber owing to changes in ambient temperature by installing a fixed interferometer to an electro-optical system by means of a support made of a material of a small coefficient of thermal expansion.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3238877A JPS53117459A (en) | 1977-03-24 | 1977-03-24 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3238877A JPS53117459A (en) | 1977-03-24 | 1977-03-24 | Electron beam exposure apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53117459A true JPS53117459A (en) | 1978-10-13 |
Family
ID=12357559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3238877A Pending JPS53117459A (en) | 1977-03-24 | 1977-03-24 | Electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53117459A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63117201A (en) * | 1986-10-29 | 1988-05-21 | インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション | Body supporter |
-
1977
- 1977-03-24 JP JP3238877A patent/JPS53117459A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63117201A (en) * | 1986-10-29 | 1988-05-21 | インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション | Body supporter |
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