JPS62170839A - 光学モニタ方法および装置 - Google Patents
光学モニタ方法および装置Info
- Publication number
- JPS62170839A JPS62170839A JP61012085A JP1208586A JPS62170839A JP S62170839 A JPS62170839 A JP S62170839A JP 61012085 A JP61012085 A JP 61012085A JP 1208586 A JP1208586 A JP 1208586A JP S62170839 A JPS62170839 A JP S62170839A
- Authority
- JP
- Japan
- Prior art keywords
- window
- optical monitoring
- optical
- light
- film formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61012085A JPS62170839A (ja) | 1986-01-24 | 1986-01-24 | 光学モニタ方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61012085A JPS62170839A (ja) | 1986-01-24 | 1986-01-24 | 光学モニタ方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170839A true JPS62170839A (ja) | 1987-07-27 |
| JPH0481723B2 JPH0481723B2 (cg-RX-API-DMAC7.html) | 1992-12-24 |
Family
ID=11795743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61012085A Granted JPS62170839A (ja) | 1986-01-24 | 1986-01-24 | 光学モニタ方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170839A (cg-RX-API-DMAC7.html) |
-
1986
- 1986-01-24 JP JP61012085A patent/JPS62170839A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0481723B2 (cg-RX-API-DMAC7.html) | 1992-12-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |