JPS6216903A - 半導体製造装置のワ−ク搬送装置 - Google Patents
半導体製造装置のワ−ク搬送装置Info
- Publication number
- JPS6216903A JPS6216903A JP15328185A JP15328185A JPS6216903A JP S6216903 A JPS6216903 A JP S6216903A JP 15328185 A JP15328185 A JP 15328185A JP 15328185 A JP15328185 A JP 15328185A JP S6216903 A JPS6216903 A JP S6216903A
- Authority
- JP
- Japan
- Prior art keywords
- rail
- tray
- feeding
- workpiece
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000004904 shortening Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15328185A JPS6216903A (ja) | 1985-07-11 | 1985-07-11 | 半導体製造装置のワ−ク搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15328185A JPS6216903A (ja) | 1985-07-11 | 1985-07-11 | 半導体製造装置のワ−ク搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6216903A true JPS6216903A (ja) | 1987-01-26 |
| JPH034443B2 JPH034443B2 (enrdf_load_stackoverflow) | 1991-01-23 |
Family
ID=15559038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15328185A Granted JPS6216903A (ja) | 1985-07-11 | 1985-07-11 | 半導体製造装置のワ−ク搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6216903A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02138090A (ja) * | 1988-11-21 | 1990-05-28 | Shimizu Corp | 搬送物の搬送方法 |
| JP2011230859A (ja) * | 2010-04-23 | 2011-11-17 | Seibu Electric & Mach Co Ltd | 板状物の搬送システム |
-
1985
- 1985-07-11 JP JP15328185A patent/JPS6216903A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02138090A (ja) * | 1988-11-21 | 1990-05-28 | Shimizu Corp | 搬送物の搬送方法 |
| JP2011230859A (ja) * | 2010-04-23 | 2011-11-17 | Seibu Electric & Mach Co Ltd | 板状物の搬送システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034443B2 (enrdf_load_stackoverflow) | 1991-01-23 |
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