JPH034443B2 - - Google Patents

Info

Publication number
JPH034443B2
JPH034443B2 JP15328185A JP15328185A JPH034443B2 JP H034443 B2 JPH034443 B2 JP H034443B2 JP 15328185 A JP15328185 A JP 15328185A JP 15328185 A JP15328185 A JP 15328185A JP H034443 B2 JPH034443 B2 JP H034443B2
Authority
JP
Japan
Prior art keywords
rail
tray
workpiece
supply
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15328185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216903A (ja
Inventor
Ryuichi Imazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP15328185A priority Critical patent/JPS6216903A/ja
Publication of JPS6216903A publication Critical patent/JPS6216903A/ja
Publication of JPH034443B2 publication Critical patent/JPH034443B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP15328185A 1985-07-11 1985-07-11 半導体製造装置のワ−ク搬送装置 Granted JPS6216903A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15328185A JPS6216903A (ja) 1985-07-11 1985-07-11 半導体製造装置のワ−ク搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15328185A JPS6216903A (ja) 1985-07-11 1985-07-11 半導体製造装置のワ−ク搬送装置

Publications (2)

Publication Number Publication Date
JPS6216903A JPS6216903A (ja) 1987-01-26
JPH034443B2 true JPH034443B2 (enrdf_load_stackoverflow) 1991-01-23

Family

ID=15559038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15328185A Granted JPS6216903A (ja) 1985-07-11 1985-07-11 半導体製造装置のワ−ク搬送装置

Country Status (1)

Country Link
JP (1) JPS6216903A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02138090A (ja) * 1988-11-21 1990-05-28 Shimizu Corp 搬送物の搬送方法
JP5427099B2 (ja) * 2010-04-23 2014-02-26 西部電機株式会社 板状物の搬送システム

Also Published As

Publication number Publication date
JPS6216903A (ja) 1987-01-26

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