JPS62167884A - 炭素被膜を有する複合体 - Google Patents

炭素被膜を有する複合体

Info

Publication number
JPS62167884A
JPS62167884A JP61277516A JP27751686A JPS62167884A JP S62167884 A JPS62167884 A JP S62167884A JP 61277516 A JP61277516 A JP 61277516A JP 27751686 A JP27751686 A JP 27751686A JP S62167884 A JPS62167884 A JP S62167884A
Authority
JP
Japan
Prior art keywords
carbon
substrate
present
film
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61277516A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530906B2 (enExample
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP61277516A priority Critical patent/JPS62167884A/ja
Publication of JPS62167884A publication Critical patent/JPS62167884A/ja
Publication of JPH0530906B2 publication Critical patent/JPH0530906B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
JP61277516A 1986-11-19 1986-11-19 炭素被膜を有する複合体 Granted JPS62167884A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61277516A JPS62167884A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61277516A JPS62167884A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56146930A Division JPS5848428A (ja) 1981-09-17 1981-09-17 炭素被膜を有する複合体およびその作製方法

Publications (2)

Publication Number Publication Date
JPS62167884A true JPS62167884A (ja) 1987-07-24
JPH0530906B2 JPH0530906B2 (enExample) 1993-05-11

Family

ID=17584686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61277516A Granted JPS62167884A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体

Country Status (1)

Country Link
JP (1) JPS62167884A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02104665A (ja) * 1988-10-11 1990-04-17 Semiconductor Energy Lab Co Ltd 炭素膜で覆われた部材
JP2003534223A (ja) * 2000-05-24 2003-11-18 ガーディアン・インダストリーズ・コーポレーション 支持体のｄｌｃ含有親水性被覆
US6925439B1 (en) 1994-06-20 2005-08-02 C-Sam, Inc. Device, system and methods of conducting paperless transactions

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOLID STATE COMMUN *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02104665A (ja) * 1988-10-11 1990-04-17 Semiconductor Energy Lab Co Ltd 炭素膜で覆われた部材
US6925439B1 (en) 1994-06-20 2005-08-02 C-Sam, Inc. Device, system and methods of conducting paperless transactions
JP2003534223A (ja) * 2000-05-24 2003-11-18 ガーディアン・インダストリーズ・コーポレーション 支持体のｄｌｃ含有親水性被覆

Also Published As

Publication number Publication date
JPH0530906B2 (enExample) 1993-05-11

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