JPS6216372B2 - - Google Patents
Info
- Publication number
- JPS6216372B2 JPS6216372B2 JP54146276A JP14627679A JPS6216372B2 JP S6216372 B2 JPS6216372 B2 JP S6216372B2 JP 54146276 A JP54146276 A JP 54146276A JP 14627679 A JP14627679 A JP 14627679A JP S6216372 B2 JPS6216372 B2 JP S6216372B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- signal
- defect
- output
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14627679A JPS5669537A (en) | 1979-11-12 | 1979-11-12 | Defect inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14627679A JPS5669537A (en) | 1979-11-12 | 1979-11-12 | Defect inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5669537A JPS5669537A (en) | 1981-06-10 |
| JPS6216372B2 true JPS6216372B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-04-13 |
Family
ID=15404060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14627679A Granted JPS5669537A (en) | 1979-11-12 | 1979-11-12 | Defect inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5669537A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58142247A (ja) * | 1982-02-18 | 1983-08-24 | Fuji Electric Co Ltd | 検査装置 |
| JPH07921Y2 (ja) * | 1988-02-05 | 1995-01-11 | 株式会社ケット科学研究所 | 米粒の状態検出装置 |
| JP5067677B2 (ja) * | 2010-03-17 | 2012-11-07 | コグネックス株式会社 | 欠陥検出方法、欠陥検出装置、及びプログラム |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5434886A (en) * | 1977-08-24 | 1979-03-14 | Kanebo Ltd | Inspector |
-
1979
- 1979-11-12 JP JP14627679A patent/JPS5669537A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5669537A (en) | 1981-06-10 |