JPS6216273B2 - - Google Patents
Info
- Publication number
- JPS6216273B2 JPS6216273B2 JP9121182A JP9121182A JPS6216273B2 JP S6216273 B2 JPS6216273 B2 JP S6216273B2 JP 9121182 A JP9121182 A JP 9121182A JP 9121182 A JP9121182 A JP 9121182A JP S6216273 B2 JPS6216273 B2 JP S6216273B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- film
- layer
- etched
- etching solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000000758 substrate Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- XZXYQEHISUMZAT-UHFFFAOYSA-N 2-[(2-hydroxy-5-methylphenyl)methyl]-4-methylphenol Chemical compound CC1=CC=C(O)C(CC=2C(=CC=C(C)C=2)O)=C1 XZXYQEHISUMZAT-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- AQGPDWZFACGYGH-UHFFFAOYSA-N [NH4+].[I].[I-] Chemical compound [NH4+].[I].[I-] AQGPDWZFACGYGH-UHFFFAOYSA-N 0.000 description 1
- 229940107816 ammonium iodide Drugs 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9121182A JPS58210168A (ja) | 1982-05-31 | 1982-05-31 | 二層膜のエツチング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9121182A JPS58210168A (ja) | 1982-05-31 | 1982-05-31 | 二層膜のエツチング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58210168A JPS58210168A (ja) | 1983-12-07 |
| JPS6216273B2 true JPS6216273B2 (US20080293856A1-20081127-C00150.png) | 1987-04-11 |
Family
ID=14020080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9121182A Granted JPS58210168A (ja) | 1982-05-31 | 1982-05-31 | 二層膜のエツチング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58210168A (US20080293856A1-20081127-C00150.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01146866U (US20080293856A1-20081127-C00150.png) * | 1988-03-31 | 1989-10-11 | ||
| JPH0365482U (US20080293856A1-20081127-C00150.png) * | 1989-10-26 | 1991-06-26 |
-
1982
- 1982-05-31 JP JP9121182A patent/JPS58210168A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01146866U (US20080293856A1-20081127-C00150.png) * | 1988-03-31 | 1989-10-11 | ||
| JPH0365482U (US20080293856A1-20081127-C00150.png) * | 1989-10-26 | 1991-06-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58210168A (ja) | 1983-12-07 |
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