JPS62158905A - コ−クス炉に於ける排ガス再循環切換燃焼方法 - Google Patents

コ−クス炉に於ける排ガス再循環切換燃焼方法

Info

Publication number
JPS62158905A
JPS62158905A JP60299399A JP29939985A JPS62158905A JP S62158905 A JPS62158905 A JP S62158905A JP 60299399 A JP60299399 A JP 60299399A JP 29939985 A JP29939985 A JP 29939985A JP S62158905 A JPS62158905 A JP S62158905A
Authority
JP
Japan
Prior art keywords
combustion
gas
fuel gas
exhaust gas
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60299399A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332681B2 (https=
Inventor
Kazumitsu Nukui
一光 温井
Masakuni Ito
伊藤　政邦
Shigeru Noji
野地　茂
Nagayasu Yuhara
湯原　永安
Wakichi Kitada
北田　和吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Gas Co Ltd
Original Assignee
Tokyo Gas Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Gas Co Ltd filed Critical Tokyo Gas Co Ltd
Priority to JP60299399A priority Critical patent/JPS62158905A/ja
Publication of JPS62158905A publication Critical patent/JPS62158905A/ja
Publication of JPH0332681B2 publication Critical patent/JPH0332681B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Air Supply (AREA)
JP60299399A 1985-12-28 1985-12-28 コ−クス炉に於ける排ガス再循環切換燃焼方法 Granted JPS62158905A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60299399A JPS62158905A (ja) 1985-12-28 1985-12-28 コ−クス炉に於ける排ガス再循環切換燃焼方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60299399A JPS62158905A (ja) 1985-12-28 1985-12-28 コ−クス炉に於ける排ガス再循環切換燃焼方法

Publications (2)

Publication Number Publication Date
JPS62158905A true JPS62158905A (ja) 1987-07-14
JPH0332681B2 JPH0332681B2 (https=) 1991-05-14

Family

ID=17872050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60299399A Granted JPS62158905A (ja) 1985-12-28 1985-12-28 コ−クス炉に於ける排ガス再循環切換燃焼方法

Country Status (1)

Country Link
JP (1) JPS62158905A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5071785A (en) * 1989-07-25 1991-12-10 Shin-Etsu Handotai Co., Ltd. Method for preparing a substrate for forming semiconductor devices by bonding warped wafers
US5129827A (en) * 1989-08-28 1992-07-14 Kabushiki Kaisha Toshiba Method for bonding semiconductor substrates
US5273553A (en) * 1989-08-28 1993-12-28 Kabushiki Kaisha Toshiba Apparatus for bonding semiconductor substrates

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5071785A (en) * 1989-07-25 1991-12-10 Shin-Etsu Handotai Co., Ltd. Method for preparing a substrate for forming semiconductor devices by bonding warped wafers
US5129827A (en) * 1989-08-28 1992-07-14 Kabushiki Kaisha Toshiba Method for bonding semiconductor substrates
US5273553A (en) * 1989-08-28 1993-12-28 Kabushiki Kaisha Toshiba Apparatus for bonding semiconductor substrates

Also Published As

Publication number Publication date
JPH0332681B2 (https=) 1991-05-14

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