JPS62158450U - - Google Patents

Info

Publication number
JPS62158450U
JPS62158450U JP1986047589U JP4758986U JPS62158450U JP S62158450 U JPS62158450 U JP S62158450U JP 1986047589 U JP1986047589 U JP 1986047589U JP 4758986 U JP4758986 U JP 4758986U JP S62158450 U JPS62158450 U JP S62158450U
Authority
JP
Japan
Prior art keywords
mask
detector
displays
ion
gradation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986047589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986047589U priority Critical patent/JPS62158450U/ja
Publication of JPS62158450U publication Critical patent/JPS62158450U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986047589U 1986-03-31 1986-03-31 Pending JPS62158450U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986047589U JPS62158450U (en:Method) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986047589U JPS62158450U (en:Method) 1986-03-31 1986-03-31

Publications (1)

Publication Number Publication Date
JPS62158450U true JPS62158450U (en:Method) 1987-10-08

Family

ID=30868332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986047589U Pending JPS62158450U (en:Method) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPS62158450U (en:Method)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105185A (en:Method) * 1974-01-28 1975-08-19
JPS5258373A (en) * 1975-11-07 1977-05-13 Fujitsu Ltd Inspection for defects of pattern forming film
JPS52119981A (en) * 1976-04-01 1977-10-07 Tokyo Keiki Kk Displaying devie for ultrasonic flaw detector

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105185A (en:Method) * 1974-01-28 1975-08-19
JPS5258373A (en) * 1975-11-07 1977-05-13 Fujitsu Ltd Inspection for defects of pattern forming film
JPS52119981A (en) * 1976-04-01 1977-10-07 Tokyo Keiki Kk Displaying devie for ultrasonic flaw detector

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