JPS6215212Y2 - - Google Patents
Info
- Publication number
- JPS6215212Y2 JPS6215212Y2 JP4883482U JP4883482U JPS6215212Y2 JP S6215212 Y2 JPS6215212 Y2 JP S6215212Y2 JP 4883482 U JP4883482 U JP 4883482U JP 4883482 U JP4883482 U JP 4883482U JP S6215212 Y2 JPS6215212 Y2 JP S6215212Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- chamber
- hydrogen
- vacuum
- silicon material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000001257 hydrogen Substances 0.000 claims description 23
- 229910052739 hydrogen Inorganic materials 0.000 claims description 23
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000002210 silicon-based material Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 15
- 230000006641 stabilisation Effects 0.000 claims description 9
- 238000011105 stabilization Methods 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 238000010924 continuous production Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 claims description 3
- 229910004469 SiHx Inorganic materials 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4883482U JPS58151638U (ja) | 1982-04-06 | 1982-04-06 | 水素含有珪素物質の連続製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4883482U JPS58151638U (ja) | 1982-04-06 | 1982-04-06 | 水素含有珪素物質の連続製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58151638U JPS58151638U (ja) | 1983-10-11 |
| JPS6215212Y2 true JPS6215212Y2 (online.php) | 1987-04-17 |
Family
ID=30059734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4883482U Granted JPS58151638U (ja) | 1982-04-06 | 1982-04-06 | 水素含有珪素物質の連続製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58151638U (online.php) |
-
1982
- 1982-04-06 JP JP4883482U patent/JPS58151638U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58151638U (ja) | 1983-10-11 |
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