JPS62147805A - Manufacture of glass sealing piezoelectric vibrator - Google Patents
Manufacture of glass sealing piezoelectric vibratorInfo
- Publication number
- JPS62147805A JPS62147805A JP28989985A JP28989985A JPS62147805A JP S62147805 A JPS62147805 A JP S62147805A JP 28989985 A JP28989985 A JP 28989985A JP 28989985 A JP28989985 A JP 28989985A JP S62147805 A JPS62147805 A JP S62147805A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- case
- stem
- sealed
- piezoelectric vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本考案はガラス封止圧電振動子の製造方法に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a method for manufacturing a glass-sealed piezoelectric vibrator.
本発明のガラス封止圧ば振動子の製造方法は、圧電発礪
片を固着したガラスステムに、ガラスステムの外径より
小さい内径の封止部分を有するガラスケースを加圧中で
加熱封着することにより、高信頼で高真空のガラス封止
圧心娠動子を提供することである。The method for manufacturing a glass-sealed pressure-wave vibrator of the present invention is to heat-seal a glass case having a sealed portion with an inner diameter smaller than the outer diameter of the glass stem under pressure to a glass stem to which a piezoelectric generator piece is fixed. By doing so, the objective is to provide a highly reliable and high-vacuum glass-sealed compression core insulator.
従来のガラス封止圧肛１辰動子の製造方法の１列として
ガラヌ封止音叉型水晶損動子の製造方法を特開昭５７−
１１５０１２号公報の様であり、第３図によりｔ説明す
る。１０１はガラスステムであり２本のリード線１０２
，１０２’を球状のガラス１０３で封着したものである
。１０２，１０２’の先端には音叉型水晶光感片１０４
を固着する。１０５はガラスケースでありその内径はガ
ラス１０５の外径より大きい。晋文型水晶発振片１０４
を固着したガラススラム１０１にガラスケース１９５を
破せ、封着部を加熱してガラス封止圧ｒに撮動子を完成
させていた。A method for manufacturing a glass-sealed tuning fork type crystal loss actuator was developed in Japanese Patent Application Laid-Open No. 1983-1981 as a method for manufacturing a conventional glass-sealed one-hole cylinder.
115012, and will be explained with reference to FIG. 101 is a glass stem with two lead wires 102
, 102' are sealed with a spherical glass 103. At the tips of 102 and 102' there is a tuning fork type crystal light sensitive piece 104.
to fix. 105 is a glass case whose inner diameter is larger than the outer diameter of the glass 105. Shinbun type crystal oscillator piece 104
The glass case 195 was broken into the glass slam 101 to which the glass slum 101 was fixed, and the sealed portion was heated to maintain the glass sealing pressure r to complete the camera element.
しかし従来のガラス封止圧４憑動子の製造方法では、ガ
ラスステムとガラスケースの間にクリアランスを有する
ため十分に加熱しガラスが完全に溶融しないと封着でき
ないため、圧電発振片に熱のダメージが加わるため圧電
発振片の特性が劣化する及び封着時にガラスから大量の
ガス発生があり、封着後にもガス発生するために内部の
真空度が低下した圧電振動子しか得られなかった。However, in the conventional manufacturing method of the glass sealing pressure 4 movable element, since there is a clearance between the glass stem and the glass case, sealing cannot be performed unless the glass is completely melted by sufficient heating. Due to the damage, the characteristics of the piezoelectric oscillation piece deteriorate, and a large amount of gas is generated from the glass during sealing, and gas is generated even after sealing, so only a piezoelectric vibrator with a reduced internal vacuum can be obtained.
そこで本発明はこのような問題点＋Ｓ決するもので、そ
の目的とするところは高信頼で高真空のガラス封止圧電
振動子を提供することである。The present invention solves these problems and aims to provide a highly reliable, high vacuum glass-sealed piezoelectric vibrator.
本発明のガラス封止圧″？ｊｉ娠動子の製造方法は、圧
電発振片を固着したガラスステムに、ガラスステムのガ
ラス部の外径より小さい内径の封止部分を有するガラス
ケースを真空中で加圧し、ガラスステムとガラスケース
の接触部を加熱溶融して封止することを％徴とする。The method for manufacturing the glass sealing pressure "?ji oscillator of the present invention is to place a glass case having a sealing part with an inner diameter smaller than the outer diameter of the glass part of the glass stem in a vacuum on a glass stem to which a piezoelectric oscillation piece is fixed. Pressure is applied to the glass stem, and the contact area between the glass stem and the glass case is heated and melted to seal it.
本発明の上記の構成によれば、圧゛亀発奈片を固ン唐し
たガラスステムにガラスステムのガラス部の外径より小
さい内径の封止部分を有するガラスケ−スケ真空中で加
圧し、ガラスステムとガラスケースの接触部を加熱溶融
して封止することから、−ガラスを完全に溶融させずガ
ラスが若干軟化した時点で封止することがｏＴ能となり
、封止に悶する加熱温度？低く設定することができ、圧
「Ｉ１片に熱のダメージが加わらないため、特性劣化の
ない、またガラス自体のガス放出端も少なくなり封着後
の内部へのガス発生が極端に少なくなり、高真空のガラ
ス封止圧電振動子が得られる。According to the above structure of the present invention, the pressure-repellent piece is pressed onto the solidified glass stem in a vacuum on the glass case having a sealed portion having an inner diameter smaller than the outer diameter of the glass portion of the glass stem; Since the contact area between the glass stem and the glass case is sealed by heating and melting, it is possible to seal the glass when it softens a little without completely melting the glass, which reduces the heating temperature required for sealing. ? Since the pressure can be set low and no heat damage is applied to the I1 piece, there is no characteristic deterioration, and the number of gas emission ends of the glass itself is reduced, resulting in extremely low gas generation inside after sealing. A high vacuum glass-sealed piezoelectric vibrator is obtained.
本発明のガラス封止圧電振動子の製造方法の１実施例を
ガラス封止音叉型水晶振動子の製盾方法を例として第１
図により説明する。１はガラスステムでめり、デュメン
ト線等からなるリード腺２゜２′を低融点ガラス（例え
ば、日本／Ｉｆ気硝子のＬ−２９ｆ、ＬＧ１６．ＬＧ７
１鉛ガラス那）のガラス部３で封着されている。本実施
例ではガラス４３は概略球状である。ガラスステム１の
リード噌２゜２′には音叉型水晶発振片４が、その表面
に蒸着、スパツク等で、Ｃｒ、Ａｕ、ＡＩ 等の金属を
付層させたマウント部５．５′に、Ａ ｕ−８ｕ、 Ａ
ｕ−８Ｉ。A first embodiment of the method for manufacturing a glass-sealed piezoelectric vibrator of the present invention will be described below using a shielding method for a glass-sealed tuning fork crystal vibrator as an example.
This will be explained using figures. 1 is fitted with a glass stem, and the lead gland 2゜2' consisting of a dument wire is attached to a low melting point glass (for example, L-29f, LG16, LG7 from Japan/Ifki Glass).
It is sealed with a glass part 3 made of lead glass. In this embodiment, the glass 43 is approximately spherical. A tuning fork-shaped crystal oscillator piece 4 is mounted on the reed 2° 2' of the glass stem 1, and a mount part 5.5' on which a metal such as Cr, Au, AI, etc. is deposited by vapor deposition, spacing, etc. A u-8u, A
u-8I.
Ａｕ−Ｇ・、Ｐｂ−８ｕ等の共晶合金によるろう付け、
Ａｆペースト等の導電性接着剤による接着、溶接等の方
法で固着される。Brazing with eutectic alloys such as Au-G・, Pb-8u,
It is fixed by adhesion with a conductive adhesive such as Af paste, welding, or the like.
音叉型水晶発振片４を固着したガラスステム１に、ガラ
ス部３の外径より小さい内径の封止部を有するステムの
ガラス部３と同１ｊ材料のガラスからなるガラスケース
６を真空中でカロ圧し、ガラス部３とガラスケース６の
接触部を、カーボンヒーター７による加熱もしくは、レ
ーザー光線の照射更には、赤外線照射等の方法で加熱し
て封止する。A glass case 6 made of the same material as the glass part 3 of the stem, which has a sealing part with an inner diameter smaller than the outer diameter of the glass part 3, is attached to a glass stem 1 to which a tuning fork-shaped crystal oscillator piece 4 is fixed. The contact portion between the glass portion 3 and the glass case 6 is sealed by heating with a carbon heater 7, laser beam irradiation, infrared ray irradiation, or the like.
なお加熱の際はガラス部３とガラスケース６の相互のガ
ラスが完全に醪ける条件ではなく、若干軟化する程度に
加熱条件を設定するのが良い。When heating, it is preferable to set the heating conditions so that the glasses in the glass part 3 and the glass case 6 are not completely melted, but are slightly softened.
第２図は本活明のガラス封止圧４撮動子の製造方法に用
いるガラスステムとガラスケースの応用例を示したもの
である。第２図（、）のガラスステム８は、ガラス部９
が上下面がシおむね平行で、側面がテーパーになってい
るものであり、ガラスケース１０の封止部に面と９１１
がなされている。FIG. 2 shows an example of the application of the glass stem and glass case used in the method of manufacturing the glass sealing pressure 4 sensor of the present invention. The glass stem 8 in FIG. 2 (,) has a glass portion 9
The upper and lower surfaces are generally parallel, and the side surfaces are tapered.
is being done.
この結果、封止時の接触が良好となりより低い温度で封
止することが可能となる。第２図（ｂ）のガラスステム
１２は、ガラス部１３の側面が球面であり、ガラスケー
ス１４の封止部も球面に設定したもので・ちる。この結
果、封止時の接触部が線状となり、加圧力が集中するた
め低い温度で確実に封止することができる。As a result, the contact during sealing becomes good and it becomes possible to seal at a lower temperature. In the glass stem 12 shown in FIG. 2(b), the side surface of the glass portion 13 is spherical, and the sealing portion of the glass case 14 is also set to be spherical. As a result, the contact portion at the time of sealing becomes linear, and since the pressing force is concentrated, it is possible to reliably seal at a low temperature.
なお以上の実施例は音叉型水晶発振片の例を示したが、
厚みすべり等の他の振動モードおよび水晶、Ｌ Ｉ Ｔ
ａ ０３． Ｌ Ｉ Ｍ ｏ Ｊ 、圧電セラミック
等の発振片を用いたガラス封止圧電振動子にも通用でき
る。Note that although the above embodiments show examples of tuning fork type crystal oscillator pieces,
Other vibration modes such as thickness shear and crystal, L I T
a 03. It can also be applied to a glass-sealed piezoelectric vibrator using an oscillation piece made of L I M o J and piezoelectric ceramic.
以上述べたように本発明によれば、圧ば発振片を固着し
たガラスステムに、ガラスステムのガラス部の外径より
小さい内径の封止部分を有するガラスケースな真空中で
加圧し、ガラスステムとガラスケースの接触部を加熱溶
融して封止することにより、低温度でガラス封止をすま
せることができるため、圧電発振片の熱によるダメージ
がなく特性の後れた、また、Ｍ７ｆ１時のガラスからの
ガス発生が極端になくなるために高真空のガラス封止圧
電振動子が潜られる。また本発明のガラス封止圧電振動
子の製造方法によれば高温の封止工程を通る結果、耐熱
性の非常に優れた圧′ｔ！振動子ができ、実装時の半田
付は性に対しまったく問題のをい、高信頼性のガラス封
止圧電撮動子が得られる。As described above, according to the present invention, a glass stem to which a pressure oscillation piece is fixed is pressurized in a vacuum of a glass case having a sealed part with an inner diameter smaller than the outer diameter of the glass part of the glass stem. By heating and melting the contact area between the glass case and the glass case, the glass sealing can be completed at a low temperature, so there is no heat damage to the piezoelectric oscillator piece and the characteristics deteriorate. A high-vacuum glass-sealed piezoelectric vibrator is used to completely eliminate gas generation from the glass. Furthermore, according to the method for manufacturing a glass-sealed piezoelectric vibrator of the present invention, as a result of going through a high-temperature sealing process, the pressure 't! A highly reliable glass-sealed piezoelectric sensor can be obtained, with no problems with soldering during mounting.
更に本発明のガラス封止圧電振動子のｉｆ！！遣方法に
よれば、圧電発振片が封止の際に十分にガス放出されて
いることと高真空で封止されているためエージング！侍
性が非常に良好な圧電発掘片が得られる。Furthermore, if! of the glass-sealed piezoelectric vibrator of the present invention! ! According to the method of use, the piezoelectric oscillator piece releases sufficient gas during sealing and is sealed in a high vacuum, so it does not age! Piezoelectric excavated pieces with very good samurai properties can be obtained.
、−ｇ １図は本発明のガラス封止圧４振動子の製造方
法としてガラス封止音叉型水晶振動子の製造方法を示す
図。
第２図（ＪＬ）（ｂ）は本発明のガラス封止圧電振動子
の製造方法に用いるガラスステムとガラスケースを示す
図。
第３図は従来のガラス封止圧電振動子の製造方法を示す
図。
１・・・ガラスステム ５・・・ガラス部４・・・
音叉型水晶発振片 ６・・・ガラスケース７・・・カー
ボン治具
８・・・ガラスステム ９・・・ガ、ラス部１０・
・・ガラスケース １１・・・面とり１２・・・ガラ
スステム １３・軸ガラス部１４、、、、ガラスケー
ス。
以上, -g 1 is a diagram showing a method for manufacturing a glass-sealed tuning fork type crystal resonator as a method for manufacturing a glass-sealed pressure 4-oscillator according to the present invention. FIG. 2 (JL) (b) is a diagram showing a glass stem and a glass case used in the method for manufacturing a glass-sealed piezoelectric vibrator of the present invention. FIG. 3 is a diagram showing a conventional method for manufacturing a glass-sealed piezoelectric vibrator. 1...Glass stem 5...Glass part 4...
Tuning fork type crystal oscillator piece 6...Glass case 7...Carbon jig 8...Glass stem 9...Glass part 10.
...Glass case 11...Chamfer 12...Glass stem 13.Shaft glass part 14...Glass case. that's all
Claims (1)
テムのガラス部の外径より小さい内径の封止部分を有す
るガラスケースを真空中で加圧し、前記ガラスステムと
前記ガラスケースの接触部を加熱溶融して封止すること
を特徴とするガラス封止圧電振動子の製造方法。A glass case having a sealed part with an inner diameter smaller than the outer diameter of the glass part of the glass stem is pressurized in a vacuum to the glass stem to which the piezoelectric oscillation piece is fixed, and the contact part between the glass stem and the glass case is heated and melted. A method for manufacturing a glass-sealed piezoelectric vibrator, characterized in that the glass-sealed piezoelectric vibrator is sealed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28989985A JPS62147805A (en) | 1985-12-23 | 1985-12-23 | Manufacture of glass sealing piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28989985A JPS62147805A (en) | 1985-12-23 | 1985-12-23 | Manufacture of glass sealing piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62147805A true JPS62147805A (en) | 1987-07-01 |
Family
ID=17749209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28989985A Pending JPS62147805A (en) | 1985-12-23 | 1985-12-23 | Manufacture of glass sealing piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62147805A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57129011A (en) * | 1981-02-02 | 1982-08-10 | Matsushima Kogyo Co Ltd | Glass sealed quartz oscillator and its manufacture |
| JPS57170612A (en) * | 1981-04-14 | 1982-10-20 | Seiko Epson Corp | Mounting method for glass-sealed quartz oscillator |
-
1985
- 1985-12-23 JP JP28989985A patent/JPS62147805A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57129011A (en) * | 1981-02-02 | 1982-08-10 | Matsushima Kogyo Co Ltd | Glass sealed quartz oscillator and its manufacture |
| JPS57170612A (en) * | 1981-04-14 | 1982-10-20 | Seiko Epson Corp | Mounting method for glass-sealed quartz oscillator |
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