JPS6348910A - Glass sealed piezoelectric vibrator and its manufacture - Google Patents
Glass sealed piezoelectric vibrator and its manufactureInfo
- Publication number
- JPS6348910A JPS6348910A JP19243086A JP19243086A JPS6348910A JP S6348910 A JPS6348910 A JP S6348910A JP 19243086 A JP19243086 A JP 19243086A JP 19243086 A JP19243086 A JP 19243086A JP S6348910 A JPS6348910 A JP S6348910A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- diameter
- case
- stem
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 104
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 238000007789 sealing Methods 0.000 claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- 230000010355 oscillation Effects 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 11
- 230000008018 melting Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 239000013078 crystal Substances 0.000 abstract description 11
- 238000003825 pressing Methods 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910017401 Au—Ge Inorganic materials 0.000 description 1
- 101100537948 Mus musculus Trir gene Proteins 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はガラス封止圧を撮動子とその製造方法に関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a glass sealing pressure sensor and a method for manufacturing the same.
従来のガラス封止圧電振動子とその製造方法の１例とし
てガラス封正音叉型水晶摂動子とその製造方法の例を特
開昭５７−１１５８１２号公報により第３図により説明
する。１０１はガラスステムであり２本のリード線１０
２ａ、 １０２ｂを球状のガラス１０３で封着したもの
である。リード線１０２ａ、１０２ｂの先端には音叉型
水晶発振片１０４が固着される。１０５はガラスケース
でありその内径はステムのガラス１０３の外径より大き
い。音叉型水晶発振片１０４を固着し友ガラスステム１
０１にガラスケース１０５を被せ、封成させていた。As an example of a conventional glass-sealed piezoelectric vibrator and its manufacturing method, an example of a glass-sealed tuning fork type crystal perturbator and its manufacturing method will be described with reference to FIG. 101 is a glass stem with two lead wires 10
2a and 102b are sealed with a spherical glass 103. A tuning fork type crystal oscillation piece 104 is fixed to the tips of the lead wires 102a and 102b. 105 is a glass case whose inner diameter is larger than the outer diameter of the glass 103 of the stem. A tuning fork type crystal oscillator piece 104 is fixed to the friend glass stem 1.
01 was covered with a glass case 105 and sealed.
しかし従来のガラス封止圧電振動子とその製造方法では
、ガラスステムがガラスケースに被っている構造のため
、封止される部分がガラスケースの内部にあること、及
びガラスステムのガラスの形状が球状で熱容量が大きい
こと、更には、ガラスステムとガラスケースの間にクリ
アランスヲ有することが原因となり、封止の際にはガラ
スケースのガラスが完全に融け、内部のガラスステムの
ガラスが十分に加熱されて両者の温度がガラスの溶融温
度以上に達しないと完全な封止が行なえなかった。However, in the conventional glass-sealed piezoelectric vibrator and its manufacturing method, the glass stem covers the glass case, so the part to be sealed is inside the glass case, and the shape of the glass of the glass stem is This is caused by the fact that it is spherical and has a large heat capacity, and also because there is a clearance between the glass stem and the glass case, so the glass in the glass case completely melts during sealing, and the glass in the internal glass stem does not fully melt. Complete sealing could not be achieved unless they were heated so that the temperature of both reached the melting temperature of the glass or higher.
これは封止の際の加熱温度が高くなること及び封止時間
が長くなることを意味し、その結果として、ガラスケー
ス及びガラスステムのガラスからのガス発生があり、封
着された後もガス発生する念めに、真空中で封止しても
内部真空度が低く、ＣＩ値時特性１エージング特性等の
特性の悪い、ガラス封止圧１！援動子し力・得られなか
つ次。This means that the heating temperature during sealing becomes higher and the sealing time becomes longer. As a result, gas is generated from the glass in the glass case and glass stem, and even after the sealing is completed, gas is generated. Just in case this happens, even if it is sealed in a vacuum, the internal vacuum is low, and the characteristics such as CI value characteristics 1 and aging characteristics are poor, and the glass sealing pressure is 1! The next thing you can't get is the power of support.
そこで本発明はこのような問題点を解決するもので、そ
の目的とするところ１１信頼で高真空のガラス封止圧電
振動子を提供することである。SUMMARY OF THE INVENTION The present invention is intended to solve these problems, and its purpose is to provide a highly vacuum glass-sealed piezoelectric vibrator that is highly reliable.
（１） 本発明のガラス封止圧電振動子は、端部に斜
面を有する筒状のガラスケースと、圧電発振片がその先
端に接合されている２本のリード線を封着してなる、ガ
ラス部の上径が下径より小さく下径がガラスケース外径
とほぼ等しいガラスステムが真空封止されていること全
特徴とする。(1) The glass-sealed piezoelectric vibrator of the present invention is formed by sealing together a cylindrical glass case having a sloped end and two lead wires each having a piezoelectric oscillation piece joined to the tip thereof. All features include a glass stem whose upper diameter is smaller than the lower diameter of the glass portion and whose lower diameter is approximately equal to the outer diameter of the glass case, and is vacuum-sealed.
（２１本発明のガラス封止圧電振動子の製造方法は、
ａ） ２本のリード線を上径が下径より小さく、下径
がガラスケースの外径とほぼ等しく、ガラスを封着して
ガラスステム全形成する工程。(21) The method for manufacturing a glass-sealed piezoelectric vibrator of the present invention is as follows: a) Two lead wires are sealed with glass, the upper diameter of which is smaller than the lower diameter, and the lower diameter of which is approximately equal to the outer diameter of the glass case. The process of completely forming the glass stem.
ｂ） ２本のリード線の先端に圧電発振片を固着する
工程。b) A process of fixing piezoelectric oscillation pieces to the tips of the two lead wires.
ｃ） ｆｇＪ記ガツガラスステム面に、端部に斜面金
有するガラスケースの端部を当接させ、真空中で接触部
を加熱溶融して封止全行なう工程。c) The step of bringing the end of a glass case having a beveled metal at the end into contact with the glass stem surface described in fgJ, and heating and melting the contact portion in a vacuum to complete the sealing process.
以上の工程からなることを特徴とする。It is characterized by consisting of the above steps.
本発明の上記の構成によれば、圧電発振片を固着したガ
ラス部の上径が下径より小さく、下径がガラスケース外
径とほぼ等しいガラスステムに、端部に斜面を有するガ
ラスケースを当接し、真空中で接触部を加熱溶融して封
止することから、封止部が表面に近くなり、光層のガラ
ス部のみを局所的に溶かすことが可能となり封止の際の
加熱温度を下げることができ、また封止に要する時間を
短縮することができ、ガラス自体からのガス発生が少な
くなり、内部１ｃ空度の高いガラス封止圧電振動子が得
られる。According to the above configuration of the present invention, the glass stem has an upper diameter smaller than the lower diameter of the glass portion to which the piezoelectric oscillation piece is fixed, and the lower diameter is approximately equal to the outer diameter of the glass case, and the glass case has an inclined surface at the end. Since the contact area is sealed by heating and melting in a vacuum, the sealing part is close to the surface, making it possible to locally melt only the glass part of the optical layer, which reduces the heating temperature during sealing. In addition, the time required for sealing can be reduced, gas generation from the glass itself is reduced, and a glass-sealed piezoelectric vibrator with a high internal vacancy can be obtained.
［実施例］
本発明のガラス封止圧電撮動子とその製造方法の一実施
例をガラス封止音叉型水晶振動子とその製造方法を例と
して第１図（Ａ）〜（Ｃ）により説明する。[Example] An embodiment of the glass-sealed piezoelectric sensor and its manufacturing method of the present invention will be explained with reference to FIGS. do.
１はガラスステムであり、デュメット線等からなるリー
ドＩ！ｉ！２ａ、２ｂｆｆｉ低融点ガラス（例えば、日
本電気硝子のＴＪ−２９ｆ 、 ＬＧ −１６、ＬＧ
−７１鉛ガラス等）のガラス部５で封着されている。1 is a glass stem, and a lead I! made of dumet wire etc. i! 2a, 2bffi low melting point glass (for example, Nippon Electric Glass TJ-29f, LG-16, LG
-71 lead glass, etc.) is sealed with a glass portion 5.
本実施例ではガラス部３は上下面がおおむね平行で、上
径が下径より小さく、下径はガラスケースの外径とほぼ
等しい形状で側面は斜面となっており、カーボンのヒー
ター等ｔｃ型押しして作られる。In this embodiment, the top and bottom surfaces of the glass portion 3 are approximately parallel, the top diameter is smaller than the bottom diameter, the bottom diameter is approximately equal to the outside diameter of the glass case, and the side surfaces are sloped. Made by pressing.
ガラスステム１のリードｌ１９Ｊ２ａ、２ｂには音叉型
水晶発振片４が、その表面に蒸着、スパッタ等でＯｒ、
Ａｕ、Ａｇ等の金属を付着させたマウント部５ａ、５ｂ
に、Ａｕ−８ｎ 、 Ａｕ−８ｉ 、 Ａｕ−Ｇｅ、Ｐ
ｂ−８ｎ等の共晶合金によるろう付け、Ａｇペースト等
の導電性接着剤による接着、溶接等の方法で固着される
。A tuning fork type crystal oscillator piece 4 is attached to the leads l19J2a and 2b of the glass stem 1, and the surface thereof is coated with Or, by vapor deposition, sputtering, etc.
Mount parts 5a and 5b to which metals such as Au and Ag are attached
, Au-8n, Au-8i, Au-Ge, P
It is fixed by a method such as brazing with a eutectic alloy such as b-8n, adhesion with a conductive adhesive such as Ag paste, or welding.
音叉型水晶発振片４を固着したガラスステム１に、ガラ
ス部３の側面に対応した端部に斜面を有しガラス部３と
同種材料のガラスからなるガラスケース６ｆｒ、真空中
で２散により加圧し、ガラス部３とガラスケ−２６の接
触部（特に表面近く）をカーボンヒーター７による加熱
もしくは、レーザー光線の照射、更には赤外線照射等の
方法で加熱して封止する。なお加熱の条件は、ガラス部
６とガラスケ−２６の相互のガラスが完全に溶ける条件
ではなく、接触部の表面近くのみが溶融する程度にして
、ガラスからのガス発生を極力おさえるのが良い。A glass case 6fr made of glass made of the same material as the glass part 3 and having a sloped end corresponding to the side surface of the glass part 3 is attached to a glass stem 1 to which a tuning fork-shaped crystal oscillator piece 4 is fixed, and is heated by dispersion in a vacuum. The contact portion (especially near the surface) between the glass portion 3 and the glass case 26 is heated and sealed by heating with the carbon heater 7, laser beam irradiation, infrared ray irradiation, or the like. Note that the heating conditions should not be such that the glasses of the glass portion 6 and the glass case 26 are completely melted, but should be such that only the areas near the surfaces of the contact portions are melted to suppress gas generation from the glass as much as possible.
なお本実捲例の方法によれば従来のガラス封止圧電振動
子とその製造方法の封止条件がＬＧ−１６ガラスを用い
た時に６８０〜７００℃で２０〜３０秒の加熱をキープ
しないと封止できず、特性もＣ１値で８０Ω８度であっ
たのに対し、同ガラスを用いて５３０〜５５０℃で１０
秒加熱することにより容易に封止することが可能となり
、ＣＩ値も２５Ω以下となり、非常に優れたガラス封止
圧′ｆｌＬ損動子が製作可能となった。According to the method of this practical example, the sealing conditions of the conventional glass-sealed piezoelectric vibrator and its manufacturing method are such that when LG-16 glass is used, heating must be maintained at 680-700°C for 20-30 seconds. It could not be sealed and its properties were 80Ω8 degrees in terms of C1 value.
By heating for seconds, it became possible to seal easily, and the CI value became 25Ω or less, making it possible to manufacture a glass loss element with extremely excellent sealing pressure.
第２図（Ａ）〜（Ｄ）は本発明のガラス封止圧電振動子
とその製造方法に用いられるガラスステムとガラスケー
スの他の実捲例を示したものである。第２図（Ａ）はガ
ラスステムの斜面が球状になったもの２１、第２図（Ｂ
）はガラスステムの斜面がＲで凹状のもの２２、第２図
（ｃ）ｔｒｉＲと凸凹が組み合わさったもの２３、第２
図（Ｄ）はガラスステムの斜面が階段状のもの２４であ
り、ガラスケース２５ 、２６゜２７．２８はそれぞれ
の形朝に対応して設けられている。FIGS. 2(A) to 2(D) show other actual winding examples of the glass stem and glass case used in the glass-sealed piezoelectric vibrator and its manufacturing method of the present invention. Figure 2 (A) shows a glass stem with a spherical slope 21, Figure 2 (B)
) is the one in which the slope of the glass stem is R and concave 22, the one in which triR and unevenness are combined in Figure 2 (c) 23, and the second
In Figure (D), the slope of the glass stem is step-like (24), and glass cases 25, 26, 27, and 28 are provided corresponding to each shape.
なお以上の実捲例のガラス封止圧電振動子としてガラス
封止音叉型水晶振動子の例を示したが、本発明のガラス
封止圧電振動子とその製造方法は矩形状ＡＴ振動子等の
厚みすべり等の他の振動モードのもの、水晶以外のＬｉ
Ｔｒｉ、０３ 、ＬｉＭＯＯ，。Although a glass-sealed tuning fork type crystal resonator is shown as an example of the glass-sealed piezoelectric vibrator in the above-mentioned actual winding example, the glass-sealed piezoelectric vibrator of the present invention and its manufacturing method can also be applied to a rectangular AT resonator, etc. Other vibration modes such as thickness shear, Li other than crystal
Tri, 03, LiMOO,.
圧電セラミック婢の他の材質の発掘片を用いたガラス封
止圧電振動子にも適用できる。It can also be applied to glass-sealed piezoelectric vibrators using pieces of piezoelectric ceramics made of other materials.
以上述べたように本発明によれば、ガラスケースの端面
が斜面になっており、ガラスステムのガラス部の上径が
下径より小さく、下径がガラスケースの外径とほぼ等し
いガラスステムとにより、圧電発振片を真空封止するこ
とにより、ガラスステムとガラスケースの封止部が封止
体の表面に近い部分になり、表層のガラス部のみ全局所
的に溶かすことが可能となり、封止の際の加熱温度を下
げることができ、ま几封止に要する時間を短縮すること
かできるようになる。As described above, according to the present invention, the end surface of the glass case is sloped, the upper diameter of the glass portion of the glass stem is smaller than the lower diameter, and the lower diameter is approximately equal to the outer diameter of the glass case. By vacuum-sealing the piezoelectric oscillator piece, the sealing part between the glass stem and the glass case becomes a part close to the surface of the sealing body, and it becomes possible to melt only the surface glass part locally, making it possible to seal. The heating temperature during sealing can be lowered, and the time required for sealing can be shortened.
そこでガラスケース及びガラスステムの全体の温度が従
来より低くなり、ガラス自体からのガス発生が少ない条
件で封止が行なえるため、内部真空度が高い、ＣＩ工値
性、エージング特性等の特性に浸れたガラス封止圧１！
摂動子が得られるようになる。Therefore, the overall temperature of the glass case and glass stem is lower than before, and sealing can be performed under conditions with less gas generation from the glass itself, resulting in improved characteristics such as high internal vacuum, CI value, and aging characteristics. Immersed glass sealing pressure 1!
Perturbators can now be obtained.
第１図（Ａ）〜（Ｃ）は本発明のガラス封止圧電振動子
とその製造方法として、ガラス封止音叉型水晶振動子と
その製造方法金示す図。
第２図（Ａ）〜（Ｄ）は本発明のガラス封止圧電振動子
とその製造方法に用いるガラスステムとガラスケースを
示す図。
第３図は従来のガラス封止圧電振動子とその製造方法を
示す図。
１・・・ガラスステム
２ａ、２ｂ・・・リード線
３・・・ガラス部
４・・・音叉型水晶発振片
５ａ、５ｂ・・・マウント部
６・・・ガラスケース
７・・・カーボンヒーター
２１．２２，２３．２４・・・ガラスステム２５．２６
，２７．２８・・・ガラスケース１０１・・・ガラスス
テム
１０２ａ、１０２ｂ・−リード線
１（１３・・・ガラス
１０４・・・音叉型水晶発振片
１０５・・・ガラスケース
以 上
他１名 〜゛′
厖１口（Ｂ）FIGS. 1A to 1C are diagrams showing a glass-sealed tuning fork type crystal resonator and a method for manufacturing the same, as a glass-sealed piezoelectric resonator and a method for manufacturing the same according to the present invention. FIGS. 2(A) to 2(D) are diagrams showing a glass stem and a glass case used in the glass-sealed piezoelectric vibrator and its manufacturing method of the present invention. FIG. 3 is a diagram showing a conventional glass-sealed piezoelectric vibrator and its manufacturing method. 1...Glass stem 2a, 2b...Lead wire 3...Glass part 4...Tuning fork type crystal oscillator pieces 5a, 5b...Mount part 6...Glass case 7...Carbon heater 21 .22, 23.24...Glass stem 25.26
, 27.28...Glass case 101...Glass stem 102a, 102b...Lead wire 1 (13...Glass 104...Tuning fork crystal oscillator piece 105...Glass case or above and 1 other person ~゛′ 1 mouth (B)
Claims (2)
振片がその先端に固着されている２本のリード線を封着
してなる、ガラス部の上径が下径より小さく下径がガラ
スケース外径とほぼ等しいガラスステムが真空封止され
ていることを特徴とするガラス封心圧電振動子。(1) A cylindrical glass case with a sloped end and a piezoelectric oscillating piece are sealed with two lead wires fixed to the tip.The upper diameter of the glass part is smaller than the lower diameter. A glass-sealed piezoelectric vibrator characterized in that a glass stem whose diameter is approximately equal to the outer diameter of a glass case is vacuum-sealed.
径がガラスケースの外径とほぼ等しく、ガラスを封着し
てガラスステムを形成する工程。 ｂ）２本のリード線の先端に圧電発振片を固着する工程
。 ｃ）前記ガラスステムのガラスの斜面に、端部に斜面を
有するガラスケースの端部を当接させ、真空中で接触部
を加熱溶融して封止を行なう工程。 以上の工程からなることを特徴とするガラス封止圧電振
動子の製造方法。(2) a) Step of forming a glass stem by sealing two lead wires with glass, the upper diameter of which is smaller than the lower diameter, and the lower diameter of which is approximately equal to the outer diameter of the glass case. b) A process of fixing piezoelectric oscillation pieces to the tips of the two lead wires. c) A step of bringing an end of a glass case having a slope at the end into contact with the slope of the glass of the glass stem, and heating and melting the contact portion in a vacuum to perform sealing. A method for manufacturing a glass-sealed piezoelectric vibrator, characterized by comprising the above steps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19243086A JPS6348910A (en) | 1986-08-18 | 1986-08-18 | Glass sealed piezoelectric vibrator and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19243086A JPS6348910A (en) | 1986-08-18 | 1986-08-18 | Glass sealed piezoelectric vibrator and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6348910A true JPS6348910A (en) | 1988-03-01 |
Family
ID=16291179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19243086A Pending JPS6348910A (en) | 1986-08-18 | 1986-08-18 | Glass sealed piezoelectric vibrator and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6348910A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7475460B2 (en) * | 2005-01-31 | 2009-01-13 | Seiko Instruments Inc. | Method of producing an airtight terminal |
-
1986
- 1986-08-18 JP JP19243086A patent/JPS6348910A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7475460B2 (en) * | 2005-01-31 | 2009-01-13 | Seiko Instruments Inc. | Method of producing an airtight terminal |
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