JPH0479167B2 - - Google Patents
Info
- Publication number
- JPH0479167B2 JPH0479167B2 JP57096191A JP9619182A JPH0479167B2 JP H0479167 B2 JPH0479167 B2 JP H0479167B2 JP 57096191 A JP57096191 A JP 57096191A JP 9619182 A JP9619182 A JP 9619182A JP H0479167 B2 JPH0479167 B2 JP H0479167B2
- Authority
- JP
- Japan
- Prior art keywords
- support member
- support
- shaft
- piezoelectric
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 4
- 239000013078 crystal Substances 0.000 description 19
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 230000035939 shock Effects 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 229910001369 Brass Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010956 nickel silver Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- MOFOBJHOKRNACT-UHFFFAOYSA-N nickel silver Chemical compound [Ni].[Ag] MOFOBJHOKRNACT-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000005028 tinplate Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
Description
【発明の詳細な説明】
本発明は、矩形状圧電振動板からなる圧電振動
子の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a piezoelectric vibrator made of a rectangular piezoelectric diaphragm.
この種の圧電振動子としては水晶振動子が広く
知られ、その矩形状水晶振動板を支持する支持部
材もいくつか紹介されているが、その長手方向両
端から互に逆向きで軸を延在させた支持部材のも
のは、振動子の取り付け面で便利であるにもかか
わらず、未だ実用化されていない。 A crystal oscillator is widely known as this type of piezoelectric oscillator, and some support members that support the rectangular crystal diaphragm have been introduced. Although the support member having the structure shown in FIG.
例えば第１図に示すように矩形状水晶振動板１
は、その長手方向両端付近で支持部材２により支
持され、筒状容器３内に収容されるが、この筒状
容器３は、支持部材２による水晶振動板１の支持
応力を一定に保持しながら、気密処理することが
困難であつた。すなわち、気密処理として、圧入
及び冷間圧接などの機械的衝撃や、金属膜焼付け
溶着及び高温半田付けなどの熱的衝撃を受けるこ
とから、支持部材２の支持応力を急変させ、水晶
振動子の諸特性を変動させていた。 For example, as shown in FIG.
is supported near both ends in the longitudinal direction by a support member 2 and is housed in a cylindrical container 3. This cylindrical container 3 maintains the stress of supporting the crystal diaphragm 1 by the support member 2 at a constant level. However, it was difficult to make it airtight. In other words, as the airtight treatment is subjected to mechanical shocks such as press-fitting and cold welding, and thermal shocks such as metal film baking welding and high-temperature soldering, the support stress of the support member 2 is suddenly changed, and the crystal resonator is Various characteristics were being changed.
本発明の目的は、上述した欠点を除去し、筒状
容器の気密処理において支持部材による水晶振動
板等の圧電振動板の支持応力を一定にさせ、安定
な振動子特性を出現させる圧電振動子とその製造
方法を提供することにあり、以下、本発明を実施
例図面を参照して詳細に説明する。 An object of the present invention is to provide a piezoelectric vibrator which eliminates the above-mentioned drawbacks, makes the supporting stress of a piezoelectric diaphragm such as a quartz diaphragm constant by a support member during airtight treatment of a cylindrical container, and exhibits stable vibrator characteristics. An object of the present invention is to provide a method for manufacturing the same, and the present invention will be described in detail below with reference to embodiment drawings.
第２図イ，ロ及びハは本発明による水晶振動子
の一実施例を示し、同図において、水晶振動板１
０は、ATカツト矩形状水晶板１１の両主面上に
厚みすべり振動すべき励振電極１２，１３と、そ
の励振電極１２，１３から長手方向に互に逆向き
に周辺まで引き出した引出電極１４，１５を真空
蒸着又はスパツタリング等により配置している。
支持部材２０は、黄銅、コバール材等の金属板か
ら加工され、水晶振動板１０の長手方向に沿つて
その引出電極１４，１５の両端部付近から互に逆
向きで軸２４を延在し、水晶振動板１０を支持す
る支持部２１と、軸２４の両側で湾曲し、中心に
孔を開けてＯ字状を形成して、長手方向に直交す
る方向に迂回させた迂回部２２と、軸２４の両側
に突き出した突出部２３とを具備してエツチング
又はプレス加工等により成形している。そして、
水晶振動板１０の引出電極１４，１５の両端部付
近を支持部材２０の支持部２１に載置して、導電
性接着剤塗布又は半田付けにより導電接着２５を
して、水晶振動板１０を支持部材２０に支持固定
する。円筒容器３０は、円筒３１と２つのキヤツ
プ３２からなり、先ず円筒３１はガラス、セラミ
ツク又は樹脂等の絶縁物をパイプ状に形成したも
のであり、その内部に前述水晶振動板１０と支持
部材２０の支持部２１、迂回部２２及び突出部２
３とを収容している。この円筒３１の両端開口部
には、洋白、黄銅等の金属により成形されたキヤ
ツプ３２が被せられ、そのキヤツプの軸中心付近
に孔３３が開けられていることから、キヤツプ３
３を被せる際には、その孔３３に支持部材２０の
端子側軸２４が貫通する。そして、円筒３１の外
側面とキヤツプ３２の内側面との間の気密処理に
ついては、高温半田付け又は耐熱性接着剤塗布に
より行われる。また、この気密処理として、円筒
３１の外側面上にニツケルクロム層を下層に、銀
等の軟質金属膜を上層にして付着しておき、キヤ
ツプ３２の内径を軟質金属膜を削除する程度の寸
法に設定しておけば、機械的に圧入接合すること
もできるし、前述した２層の外側面をもつた円筒
３１と、スズメツキした内側面をもつたキヤツプ
３２とを嵌合する寸法に設定しておけば、嵌合状
態で焼き付ける（約200〜300℃）ことにより、銀
膜とスズメツキが溶着して、いわゆるメタルボン
デングすることもできる。 Figures 2A, 2B and 2C show an embodiment of a crystal resonator according to the present invention, in which a crystal diaphragm 1
0 indicates excitation electrodes 12 and 13 to vibrate through thickness sliding on both main surfaces of the AT cut rectangular crystal plate 11, and extraction electrodes 14 drawn out from the excitation electrodes 12 and 13 in opposite directions to the periphery in the longitudinal direction. , 15 are arranged by vacuum deposition or sputtering.
The support member 20 is machined from a metal plate such as brass or Kovar material, and has a shaft 24 extending in opposite directions from near both ends of the extraction electrodes 14 and 15 along the longitudinal direction of the crystal diaphragm 10. A support part 21 that supports the crystal diaphragm 10, a detour part 22 that is curved on both sides of the shaft 24, has a hole in the center to form an O shape, and is detoured in a direction perpendicular to the longitudinal direction. 24 and protruding portions 23 protruding from both sides thereof, and is formed by etching or pressing. and,
The vicinity of both ends of the lead electrodes 14 and 15 of the crystal diaphragm 10 are placed on the support part 21 of the support member 20, and conductive adhesive 25 is applied by applying a conductive adhesive or soldering to support the crystal diaphragm 10. It is supported and fixed to the member 20. The cylindrical container 30 is composed of a cylinder 31 and two caps 32. First, the cylinder 31 is made of an insulating material such as glass, ceramic, or resin and formed into a pipe shape. Support part 21, detour part 22 and protrusion part 2
It accommodates 3. The openings at both ends of the cylinder 31 are covered with caps 32 made of metal such as nickel silver or brass, and a hole 33 is bored near the center of the axis of the cap.
3, the terminal side shaft 24 of the support member 20 passes through the hole 33. The airtightness between the outer surface of the cylinder 31 and the inner surface of the cap 32 is achieved by high-temperature soldering or by applying a heat-resistant adhesive. In addition, for this airtight treatment, a nickel chrome layer is attached as a lower layer and a soft metal film such as silver as an upper layer on the outer surface of the cylinder 31, and the inner diameter of the cap 32 is adjusted to a size that removes the soft metal film. If it is set to 1, it is possible to mechanically press-fit the two, or it is possible to set the size to fit the cylinder 31 with the aforementioned two-layered outer surface and the cap 32 with the tinted inner surface. If this is done, the silver film and tin plate can be welded together by baking them in the fitted state (approximately 200 to 300°C), resulting in so-called metal bonding.
いずれにせよ気密処理の際には、熱的又は機械
的な衝撃を受けるが、本発明によれば支持部材２
０の迂回部２２が介在していることから、その衝
撃を緩和させ、支持部材２０の支持応力をほぼ一
定に保持することができる。 In any case, during the airtight treatment, the support member 2 is subjected to thermal or mechanical shock, but according to the present invention, the support member 2
Since the detour portion 22 of 0 is interposed, the impact can be alleviated and the support stress of the support member 20 can be maintained substantially constant.
次に、キヤツプ３２の孔３３とそこから貫通し
た支持部材２０の端子側軸２４との間隙には、高
温半田付け又は耐熱性接着剤塗布などの充填材３
４で円筒容器３０の気密を得る。その充填の際、
充填材３４が円筒３１の内部の支持部材２０に流
入するが、本発明によれば突出部２３にてその流
入を阻止して、支持部材２０の一定な支持応力を
確保することができる。 Next, in the gap between the hole 33 of the cap 32 and the terminal-side shaft 24 of the support member 20 penetrating therefrom, a filler material 3 such as high-temperature soldering or heat-resistant adhesive coating is applied.
Step 4 makes the cylindrical container 30 airtight. During its filling,
Although the filler 34 flows into the support member 20 inside the cylinder 31, according to the present invention, the protrusion 23 can prevent this flow and ensure a constant support stress of the support member 20.
以上の支持部材２０は第３図イの詳細斜視図で
示され、その変形例として同図ロに示すようにＵ
字状に形成した迂回部２２′でもよいし、また図
示しないがＶ字状又はＳ字状等に形成してもよ
い。突出部２３は本例のように軸２４の両側から
突き出したものが好ましいが、一方の側面から突
き出したものであつてもよい。 The support member 20 described above is shown in a detailed perspective view in FIG.
The detour portion 22' may be formed in a shape of a letter, or may be formed in a V-shape, an S-shape, etc. although not shown. The protrusions 23 preferably protrude from both sides of the shaft 24 as in this example, but may protrude from one side.
次に、第４図イ，ロ，ハ及びニは本発明による
水晶振動子の製造方法の実施例を示し、先ず、水
晶振動板１０の引出電極１４，１５の長手方向両
端部付近を、予め共通保持部材２６で一体的に形
成された支持部材２０の支持部２１に載置して、
導電接着２５で支持固定した後、支持部材２０を
共通保持部材２６から切り離す（同図イ，ロ）。
次に、水晶振動板１０を支持固定した支持部材２
０を円筒３１に収容し（同図ハ）、その支持部材
２０の両端子側の軸２４をキヤツプ３２の孔３３
に貫通させて、そのキヤツプ３２を円筒３１に被
せ、前述したように円筒３１とキヤツプ３２の間
及びキヤツプ３２の孔３３と支持部材２０の軸２
４の間隙について気密処理を行う。 Next, FIGS. 4A, 4B, 4C and 4D show an embodiment of the method for manufacturing a crystal resonator according to the present invention. Placed on the support part 21 of the support member 20 integrally formed with the common holding member 26,
After supporting and fixing with the conductive adhesive 25, the supporting member 20 is separated from the common holding member 26 (FIGS. 1 and 2).
Next, the support member 2 supporting and fixing the crystal diaphragm 10 is
0 is housed in the cylinder 31 (FIG.
The cap 32 is placed over the cylinder 31, and the hole 33 of the cap 32 and the shaft 2 of the support member 20 are inserted between the cylinder 31 and the cap 32 as described above.
Perform air-tight treatment for gaps 4.
このような製造方法によれば、気密処理時に発
生する機械的又は熱的な衝撃に対して、前述した
迂回部２２の介在による緩和作用の他に、その気
密処理時において支持部材２０の軸２４がキヤツ
プ３２の孔３３に貫通した状態にあることから、
軸２４のまわりの回転移動とその軸２４の長手方
向移動を自由にして確保し、それらの移動により
衝撃を一層緩和させ、支持部材２０による水晶振
動板１０への支持応力を一定に維持することがで
きる。 According to such a manufacturing method, in addition to the mitigating effect of the above-mentioned detour portion 22 against the mechanical or thermal shock that occurs during the airtight process, the shaft 24 of the support member 20 during the airtight process Since the hole 33 of the cap 32 is penetrated,
To freely ensure rotational movement around the shaft 24 and movement in the longitudinal direction of the shaft 24, to further reduce impact by these movements, and to maintain constant support stress on the crystal diaphragm 10 by the support member 20. I can do it.
以上の実施例において、筒状容器について円筒
状のものを挙げたが、本発明は角筒状、だ円筒状
のものでもよいし、また圧電板として水晶板以外
に、タンタル酸リチウム、ニオブ酸リチウム又は
圧電セラミツク等の圧電板についても本発明は実
施できるし、また更に、支持部材の端子側の軸は
振動子の端子となるが、これを切り落せば、キヤ
ツプを端子としたチツプ状の圧電振動子を提供す
ることもできる。 In the above embodiments, the cylindrical container was described as a cylindrical container, but the present invention may also be a prismatic or elliptical container. The present invention can also be carried out with piezoelectric plates such as lithium or piezoelectric ceramics, and furthermore, the shaft on the terminal side of the support member becomes the terminal of the vibrator, but if this is cut off, a chip-shaped plate with the cap as the terminal can be obtained. A piezoelectric vibrator can also be provided.
第１図は従来の水晶振動子構造を示す斜視図、
第２図イ，ロ及びハは本発明の一実施例である水
晶振動子構造を示す図、第３図イ及びロは支持部
材を示す詳細斜視図、第４図イ，ロ，ハ及びニは
本発明の一実施例である水晶振動子の製造方法を
示す図である。
１０…水晶振動板、１１…水晶板、１２，１３
…励振電極、２０，２０′…支持部材、２１…支
持部、２２，２２′…迂回部、２３…突出部、２
４…軸、２５…導電接着、３０…筒状容器、３１
…円筒、３２…キヤツプ、３３…孔。
Figure 1 is a perspective view showing the structure of a conventional crystal oscillator.
2A, 2B and 2C are diagrams showing a crystal resonator structure according to an embodiment of the present invention, 3A and 3B are detailed perspective views showing the support member, and 4A, 4B, 3D and 4B are detailed perspective views showing the supporting member. 1 is a diagram showing a method for manufacturing a crystal resonator according to an embodiment of the present invention. 10...Crystal diaphragm, 11...Crystal plate, 12, 13
...Excitation electrode, 20, 20'...Support member, 21...Support part, 22, 22'...Detour part, 23...Protrusion part, 2
4... Axis, 25... Conductive adhesive, 30... Cylindrical container, 31
...Cylinder, 32...Cap, 33...Hole.
Claims (1)
た圧電振動板の長手方向両端付近を、互いに逆向
きで該長手方向に軸を延在した支持部材に支持し
た圧電振動子の製造方法において、該支持部材に
該圧電振動板を支持する支持部と、該長手方向に
直交する方向に該軸から迂回した迂回部と該軸か
ら突き出した突出部とを予め形成しておき、該圧
電振動板の長手方向両端付近を該支持部材の該支
持部に導電接着し、次に該圧電振動板と該支持部
材の該支持部、該迂回部及び該突出部とを筒の内
部に収容するとともに、該筒の両端開口部にキヤ
ツプを被せて該支持部材の端子側の該軸を該キヤ
ツプに開けた孔に貫通させた状態で該筒と該キヤ
ツプとの気密処理をし、該キヤツプの孔と該支持
部の該軸との間隔を封止していることを特徴とす
る圧電振動子の製造方法。1. A method for manufacturing a piezoelectric vibrator, in which the vicinity of both longitudinal ends of a piezoelectric diaphragm, in which excitation electrodes are arranged on both main surfaces of a rectangular piezoelectric plate, are supported by support members whose axes extend in the longitudinal direction in opposite directions. In this method, a support part for supporting the piezoelectric diaphragm, a detour part that detours from the shaft in a direction perpendicular to the longitudinal direction, and a protrusion part that protrudes from the shaft are formed in advance on the support member, and the piezoelectric diaphragm is The vicinity of both longitudinal ends of the diaphragm are conductively bonded to the support portion of the support member, and then the piezoelectric diaphragm, the support portion, the bypass portion, and the protrusion portion of the support member are housed inside a cylinder. At the same time, the tube and the cap are airtighted by covering the openings at both ends of the tube and passing the shaft on the terminal side of the support member through the hole drilled in the cap. A method for manufacturing a piezoelectric vibrator, characterized in that a distance between a hole and the shaft of the support portion is sealed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9619182A JPS58213518A (en) | 1982-06-07 | 1982-06-07 | Piezoelectric vibrator and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9619182A JPS58213518A (en) | 1982-06-07 | 1982-06-07 | Piezoelectric vibrator and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58213518A JPS58213518A (en) | 1983-12-12 |
| JPH0479167B2 true JPH0479167B2 (en) | 1992-12-15 |
Family
ID=14158407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9619182A Granted JPS58213518A (en) | 1982-06-07 | 1982-06-07 | Piezoelectric vibrator and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58213518A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH066595Y2 (en) * | 1985-08-09 | 1994-02-16 | 日本電波工業株式会社 | Piezoelectric oscillator |
| JP4714558B2 (en) * | 2005-11-04 | 2011-06-29 | セイコーインスツル株式会社 | Piezoelectric vibrator and surface-mount piezoelectric vibrator |
| JP4863853B2 (en) * | 2006-11-30 | 2012-01-25 | セイコーインスツル株式会社 | Piezoelectric vibrator, method of manufacturing the piezoelectric vibrator, oscillator including the piezoelectric vibrator, electronic device, and radio timepiece |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55105420A (en) * | 1979-02-06 | 1980-08-13 | Seiko Instr & Electronics Ltd | Frequency control method for piezoelectric oscillator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848813Y2 (en) * | 1976-06-07 | 1983-11-08 | 日本電気ホームエレクトロニクス株式会社 | crystal oscillation device |
-
1982
- 1982-06-07 JP JP9619182A patent/JPS58213518A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55105420A (en) * | 1979-02-06 | 1980-08-13 | Seiko Instr & Electronics Ltd | Frequency control method for piezoelectric oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58213518A (en) | 1983-12-12 |
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