JPH0461526B2 - - Google Patents
Info
- Publication number
- JPH0461526B2 JPH0461526B2 JP58113537A JP11353783A JPH0461526B2 JP H0461526 B2 JPH0461526 B2 JP H0461526B2 JP 58113537 A JP58113537 A JP 58113537A JP 11353783 A JP11353783 A JP 11353783A JP H0461526 B2 JPH0461526 B2 JP H0461526B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- thickness
- region
- vibration
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 description 23
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は厚みすべり振動を行う圧電振動子に関
するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a piezoelectric vibrator that performs thickness-shear vibration.
［従来技術とその解決すべき課題］
従来の厚みすべり圧電振動子は、水晶片を振動
子として用いるものが多いが、水晶片の表面の振
動変位が大きいため、表面にごみや汚れなどが付
着すると著しく特性が劣化してしまつた。このた
め水晶の封止容器が必要であり、容器内を真空に
したり、不活性ガス置換を行うため、構成が複雑
になり、製造が煩雑になつていた。また、水晶片
は保持部材によつて保持され回路基板に取り付け
られていた。このため、保持部材が必要であると
ともに、保持の方法によつては保持応力の影響が
大きく、耐衝撃性、耐震動性を劣化させる原因に
なつていた。[Prior art and its problems to be solved] Conventional thickness-shear piezoelectric vibrators often use a crystal piece as a vibrator, but because the vibration displacement of the surface of the crystal piece is large, dust and dirt may adhere to the surface. As a result, the characteristics deteriorated significantly. For this reason, a sealed crystal container is required, and the interior of the container is evacuated or replaced with an inert gas, making the structure complicated and manufacturing complicated. Further, the crystal piece was held by a holding member and attached to the circuit board. Therefore, a holding member is required, and depending on the holding method, the influence of holding stress is large, causing deterioration of impact resistance and vibration resistance.
［発明の目的］
そこで本発明の目的は、封止容器、保持部材を
必要とせず、外界の影響をほとんど受けない厚み
すべり圧電振動子を提供することにある。[Object of the Invention] Therefore, an object of the present invention is to provide a thickness-shear piezoelectric vibrator that does not require a sealed container or a holding member and is hardly affected by the outside world.
［目的を達成する手段］
本発明に係る厚みすべり圧電振動子は、ドーピ
ング材をドーピングして圧電素子の両面の表層部
にそれぞれ実質的に全面にわたつて形成された非
圧電領域と、中央部のドーピングされない圧電領
域とから構成されている。この圧電領域には厚み
すべり振動エネルギが集中しており、非圧電領域
は、圧電素子の表裏両面において振動変位が実質
的に０でありかつ電荷の検出が可能な厚さに形成
されているものである。[Means for Achieving the Object] The thickness-shear piezoelectric vibrator according to the present invention has non-piezoelectric regions doped with a doping material to cover substantially the entire surfaces of both surfaces of the piezoelectric element, and a central region. and an undoped piezoelectric region. Thickness shear vibration energy is concentrated in this piezoelectric region, and the non-piezoelectric region is formed to have a thickness that allows vibration displacement to be substantially 0 on both the front and back surfaces of the piezoelectric element and to enable charge detection. It is.
［作用］
本発明に係る圧電素子両表面の非圧電領域は、
電荷の検出が可能であるため、この非圧電領域上
に駆動電極を形成することができる。従つて、圧
電素子の両表面を、全面にわたつて非圧電領域と
なすことができる。このため、この圧電素子は、
ごみや汚れの付着による特性の劣化といつた、外
界からの影響を受ける恐れがなくなる。[Function] The non-piezoelectric regions on both surfaces of the piezoelectric element according to the present invention are
Since charge can be detected, drive electrodes can be formed on this non-piezoelectric region. Therefore, both surfaces of the piezoelectric element can be made non-piezoelectric regions over the entire surface. Therefore, this piezoelectric element
There is no risk of being influenced by the outside world, such as deterioration of characteristics due to adhesion of dust or dirt.
［実施例］ 以下本発明の一実施例を詳細に説明する。[Example] An embodiment of the present invention will be described in detail below.
第１図において、１は厚みすべり圧電振動子の
一例のATカツト水晶振動子である。水晶片２
は、Ｘ軸を中心としてＺ軸を約35度回転させたＸ
−Z′平面に平行に截出したものであり、Ｘ軸方向
を長手方向とする直方体形状である。本実施例で
は、長さを約7.0mm、幅を約1.8mm、厚さを約1.2mm
としている。水晶片２の表面２ａ，２ｂ、すなわ
ちＸ−Z′平面には、水晶ドーピング可能なものと
してアルミニウム薄膜３，３が真空蒸着などによ
り形成され、これがドーピングされることによ
り、水晶片２の表層部に非圧電領域３ａ，３ａが
設けられている。本実施例では、ドーピング方法
として拡散による方法を用いている。すなわち、
水晶片２の両表面にアルミニウム薄膜３，３を形
成し、高温でアルミニウムを水晶片２に拡散さ
せ、絶縁性の非圧電領域３ａ，３ａを形成する。
従つて、処理時間に比例して非圧電領域３ａ，３
ａは成長する。水晶片２の中央部は、アルミニウ
ムが拡散していない圧電領域２ｃであり、ここの
厚さｔにより厚みすべり振動の共振周波数が決定
される。すなわち共振周波数ｆは、
ｆ≒１／2t×√66
となる。C66は水晶の弾性定数、ρは水晶の密度
である。本実施例では、ｔ≒0.4mmでｆ≒３〜4M
Hzの共振周波数となつている。水晶片２の表面２
ａ，２ｂには、アルミニウム薄膜３，３を介し
て、金属を真空蒸着するなどして駆動電極４，５
が形成してある。そして、一方の駆動電極４から
は引出し電極４ａが他方の表面２ｂの端部にまで
延出形成してある。水晶振動子１は配線基板（図
示せず。）に接着などにより直接固定できるもの
であり、引出し電極４ａおよび駆動電極５はそれ
ぞれ配線基板上の配線パターンと接続される。 In FIG. 1, reference numeral 1 denotes an AT-cut crystal resonator, which is an example of a thickness-shear piezoelectric resonator. crystal piece 2
is the X axis with the Z axis rotated approximately 35 degrees around the X axis.
It is cut out parallel to the -Z' plane, and has a rectangular parallelepiped shape with the X-axis direction as the longitudinal direction. In this example, the length is approximately 7.0 mm, the width is approximately 1.8 mm, and the thickness is approximately 1.2 mm.
It is said that On the surfaces 2a and 2b of the crystal blank 2, that is, on the X-Z' plane, aluminum thin films 3, 3, which can be doped with the crystal, are formed by vacuum evaporation or the like, and by doping, the surface layer of the crystal blank 2 is Non-piezoelectric regions 3a, 3a are provided in . In this embodiment, a diffusion method is used as a doping method. That is,
Aluminum thin films 3, 3 are formed on both surfaces of the crystal blank 2, and aluminum is diffused into the crystal blank 2 at high temperature to form insulating non-piezoelectric regions 3a, 3a.
Therefore, the non-piezoelectric regions 3a, 3
a grows. The central portion of the crystal piece 2 is a piezoelectric region 2c in which aluminum is not diffused, and the thickness t here determines the resonance frequency of thickness shear vibration. That is, the resonant frequency f is f≒1/2t× √66 . C 66 is the elastic constant of the crystal, and ρ is the density of the crystal. In this example, when t≒0.4mm, f≒3~4M
It has a resonant frequency of Hz. Surface 2 of crystal piece 2
Drive electrodes 4, 5 are formed on a, 2b by vacuum evaporating metal through aluminum thin films 3, 3.
is formed. A lead electrode 4a is formed extending from one drive electrode 4 to the end of the other surface 2b. The crystal resonator 1 can be directly fixed to a wiring board (not shown) by adhesive or the like, and the extraction electrode 4a and the drive electrode 5 are each connected to a wiring pattern on the wiring board.
駆動電極４，５に電界を印加すると、水晶振動
子１は厚みすべり振動を行う。第２図に、この厚
みすべり振動の振動変位を示している。この図の
縦軸７は、振動変位が０の線を表している。これ
によると、圧電領域２ｃと非圧電領域３ａ、３ａ
との境界面近傍において最大となる。そして、振
動変位は非圧電領域３ａ，３ａにて徐々に減衰す
る。このことは、厚みすべり振動の平面波解と圧
電基本式、運動方程式そしてラプラスの式から厚
み方向の伝搬係数を調べると厚み方向で減衰解を
もつことからもわかる。本発明においては、表面
２ａ，２ｂにおいて振動変位が極めて小さく実質
的に０になる。 When an electric field is applied to the drive electrodes 4 and 5, the crystal resonator 1 performs thickness shear vibration. Figure 2 shows the vibration displacement of this thickness shear vibration. The vertical axis 7 in this figure represents the line where the vibration displacement is zero. According to this, the piezoelectric region 2c and the non-piezoelectric regions 3a, 3a
It is maximum near the interface with The vibration displacement is then gradually attenuated in the non-piezoelectric regions 3a, 3a. This can be seen from the fact that when the propagation coefficient in the thickness direction is examined from the plane wave solution of the thickness shear vibration, the piezoelectric basic equation, the equation of motion, and Laplace's equation, there is a damping solution in the thickness direction. In the present invention, the vibration displacement on the surfaces 2a and 2b is extremely small and becomes substantially zero.
また、第３図に水晶振動子１の振動中の電荷分
布を示している。この図の縦軸８は、電荷が０の
線を表している。これによると、電荷分布も圧電
領域２ｃと非圧電領域３ａ，３ａとの境界面近傍
で最も大きく、絶縁性の非圧電領域３ａ，３ａに
て徐々に減衰する。そして本発明では、電荷は検
出可能な大きさで表面２ａ，２ｂへ伝わる。従つ
て、表面２ａ，２ｂに駆動電極４，５を形成する
ことができる。そして圧電振動は、水晶片２の表
面２ａ，２ｂに形成された駆動電極４，５によつ
て電荷を検出して行なうものである。 Further, FIG. 3 shows the charge distribution during vibration of the crystal resonator 1. The vertical axis 8 in this figure represents a line with zero charge. According to this, the charge distribution is also largest near the interface between the piezoelectric region 2c and the non-piezoelectric regions 3a, 3a, and gradually attenuates in the insulating non-piezoelectric regions 3a, 3a. In the present invention, the charge is transferred to the surfaces 2a, 2b in a detectable magnitude. Therefore, drive electrodes 4 and 5 can be formed on surfaces 2a and 2b. The piezoelectric vibration is performed by detecting electric charge using drive electrodes 4 and 5 formed on the surfaces 2a and 2b of the crystal piece 2.
このように、本発明においては、圧電振動子１
の振動変位が表面２ａ，２ｂで実質的に０になる
とともに、振動中に表面２ａ，２ｂにおいて検出
可能な大きさで電荷が存在するように、非圧電領
域３ａ，３ａの厚さが設定されている。そして、
水晶片２の厚さｈは、上記の条件を満たすように
設定された非圧電領域３ａ，３ａの厚さと、共振
周波数２ｃの厚さｔとの和として決定される。 In this way, in the present invention, the piezoelectric vibrator 1
The thicknesses of the non-piezoelectric regions 3a, 3a are set such that the vibrational displacement of the piezoelectric regions 3a, 3a is substantially zero on the surfaces 2a, 2b, and a detectable charge is present on the surfaces 2a, 2b during vibration. ing. and,
The thickness h of the crystal blank 2 is determined as the sum of the thickness of the non-piezoelectric regions 3a, 3a set to satisfy the above conditions, and the thickness t of the resonance frequency 2c.
このように本発明によると、非圧電領域におい
て電荷を検出することが可能なので、従来のよう
に駆動電極を取り付けるために圧電領域を表面に
露出させる必要がなく、表裏両面を全面にわたつ
て非圧電領域としてそこに駆動電極を設けること
ができる。そして本発明に係る圧電振動子は、水
晶片の表裏両面の振動変位を極めて小さく実質的
に０にしているため、直接に配線基板上に接着な
どにより固着することができ、保持部材が不要に
なり、構成が簡単になる。また、配線基板上に他
の部品と同時に取り付けることができるので組立
の簡素化および自動化が図れる。そして、圧電振
動子の共振周波数は中央部の圧電領域によつて決
まるため、非圧電領域である振動子表面にごみや
汚れが付着したり、電極などが酸化しても共振周
波数に影響を与える恐れがなく、封止容器を用い
る必要がなく構成が簡単になる。さらに、圧電領
域の外側に非圧電領域を所定の厚さだけ形成して
いるため、従来に比べて圧電素子全体の厚さが厚
くでき、高い強度をもつ高周波の厚みすべり振動
子が提供できる。 As described above, according to the present invention, it is possible to detect charges in the non-piezoelectric region, so there is no need to expose the piezoelectric region to the surface in order to attach the drive electrode as in the conventional method, and the non-piezoelectric region can be detected over the entire surface of both the front and back surfaces. A drive electrode can be provided there as a piezoelectric region. Furthermore, since the piezoelectric vibrator according to the present invention has extremely small vibrational displacement on both the front and back surfaces of the crystal piece and is virtually zero, it can be directly fixed onto a wiring board by adhesive or the like, eliminating the need for a holding member. This simplifies the configuration. Furthermore, since it can be mounted on the wiring board at the same time as other parts, assembly can be simplified and automated. The resonant frequency of a piezoelectric vibrator is determined by the piezoelectric region in the center, so even if dust or dirt adheres to the surface of the vibrator, which is a non-piezoelectric region, or the electrodes oxidize, the resonant frequency will be affected. There is no fear, and there is no need to use a sealed container, which simplifies the configuration. Furthermore, since the non-piezoelectric region is formed with a predetermined thickness outside the piezoelectric region, the overall thickness of the piezoelectric element can be made thicker than in the past, and a high-frequency thickness-shear vibrator with high strength can be provided.
なお、本実施例においては圧電素子として水晶
片の例を示したが、リチウムタンタレートなどの
他の圧電材料を用いることができ、ドーピング材
としてはアルミニウムの他にチタン、モリブデ
ン、クロム、ジルコニウムなどを用いることがで
きる。 In this example, a crystal piece is shown as an example of a piezoelectric element, but other piezoelectric materials such as lithium tantalate can be used, and doping materials include titanium, molybdenum, chromium, zirconium, etc. in addition to aluminum. can be used.
またドーピングの例とて拡散の例を示したが、
ドーピング材料の融液に浸漬後熱処理する方法あ
るいはイオン注入した後熱拡散させる方法など
種々の方法を適用できる。 Also, although we have shown an example of diffusion as an example of doping,
Various methods can be applied, such as a method of heat treatment after immersion in a melt of doping material, or a method of thermal diffusion after ion implantation.
さらに、ドーピングにより形成された非圧電領
域が導体の場合、その表面を駆動電極として利用
することができ、別に駆動電極を設ける必要がな
い。 Furthermore, if the non-piezoelectric region formed by doping is a conductor, its surface can be used as a drive electrode, and there is no need to provide a separate drive electrode.
［効果］
本発明によれば、厚みすべり振動子を裸のまま
直接配線基板上に取り付けられるため、保持部材
が不要になり、取付工程も簡単になる。また、振
動子の表裏両面を全面的に非圧電領域とすること
が可能なので、ごみや汚れの付着など外界の影響
により振動特性に変動を与える恐れがなく、振動
子を封止する必要がなくなる。このように、振動
子を取り付けるための部品数が減り、構成が簡単
で取付スペースが小さくなる。そして、振動子の
取付後の耐衝撃性や耐震動性も向上する。[Effects] According to the present invention, since the thickness-shear vibrator can be directly mounted on the wiring board without being exposed, a holding member is not required and the mounting process is also simplified. Additionally, since both the front and back sides of the vibrator can be completely non-piezoelectric areas, there is no risk of fluctuations in vibration characteristics due to external influences such as dust or dirt, and there is no need to seal the vibrator. . In this way, the number of parts for installing the vibrator is reduced, the configuration is simple, and the installation space is reduced. Furthermore, the impact resistance and vibration resistance after the vibrator is attached are also improved.
図面は本発明の一実施例を示し、第１図は圧電
振動子の断面図、第２図は振動変位を示す部分拡
大断面図、第３図は電荷分布を示す部分拡大断面
図である。
１……厚みすべり圧電振動子、２……圧電素子
（水晶片）、２ａ，２ｂ……表面、２ｃ……圧電領
域、２ｄ，２ｅ……非圧電領域、３，３……ドー
ピング材（アルミニウム薄膜）。
The drawings show an embodiment of the present invention; FIG. 1 is a sectional view of a piezoelectric vibrator, FIG. 2 is a partially enlarged sectional view showing vibration displacement, and FIG. 3 is a partially enlarged sectional view showing charge distribution. DESCRIPTION OF SYMBOLS 1... Thickness-shear piezoelectric vibrator, 2... Piezoelectric element (crystal piece), 2a, 2b... Surface, 2c... Piezoelectric region, 2d, 2e... Non-piezoelectric region, 3, 3... Doping material (aluminum) thin film).
Claims (1)
の表層部にそれぞれ実質的に全面にわたつて形成
された非圧電領域と、中央部のドーピングされな
い圧電領域とから構成され、 上記中央部の圧電領域には厚みすべり振動エネ
ルギが集中しており、上記非圧電領域は、上記圧
電素子の表裏両面において振動変位が実質的に０
になるとともに表裏両面において電荷の検出が可
能な厚さに形成されている ことを特徴とする厚みすべり圧電振動子。[Claims] Consisting of a non-piezoelectric region doped with a doping material to cover substantially the entire surface of both surfaces of the piezoelectric element, and an undoped piezoelectric region in the center, The thickness shear vibration energy is concentrated in the piezoelectric region of the piezoelectric element, and the vibration displacement of the non-piezoelectric region is substantially zero on both the front and back surfaces of the piezoelectric element.
A thickness-shear piezoelectric vibrator characterized in that it is formed to a thickness that allows charge to be detected on both the front and back surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11353783A JPS605619A (en) | 1983-06-23 | 1983-06-23 | Thickness-shear piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11353783A JPS605619A (en) | 1983-06-23 | 1983-06-23 | Thickness-shear piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS605619A JPS605619A (en) | 1985-01-12 |
| JPH0461526B2 true JPH0461526B2 (en) | 1992-10-01 |
Family
ID=14614829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11353783A Granted JPS605619A (en) | 1983-06-23 | 1983-06-23 | Thickness-shear piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS605619A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5136635B2 (en) * | 2010-12-20 | 2013-02-06 | セイコーエプソン株式会社 | Piezoelectric vibrator |
| SG11201608133PA (en) * | 2014-05-26 | 2016-11-29 | Ulvac Inc | Film-forming device, method for measuring film thickness of organic film, and film thickness sensor for organic film |
| JP6820690B2 (en) * | 2016-08-26 | 2021-01-27 | 京セラ株式会社 | Manufacturing method of crystal vibrating element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5058994A (en) * | 1973-09-26 | 1975-05-22 |
-
1983
- 1983-06-23 JP JP11353783A patent/JPS605619A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5058994A (en) * | 1973-09-26 | 1975-05-22 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS605619A (en) | 1985-01-12 |
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