JPS6141215A - Crystal resonator - Google Patents
Crystal resonatorInfo
- Publication number
- JPS6141215A JPS6141215A JP16303184A JP16303184A JPS6141215A JP S6141215 A JPS6141215 A JP S6141215A JP 16303184 A JP16303184 A JP 16303184A JP 16303184 A JP16303184 A JP 16303184A JP S6141215 A JPS6141215 A JP S6141215A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- electrode
- plate
- piece
- resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 58
- 239000011521 glass Substances 0.000 claims description 2
- 230000006866 deterioration Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 230000035939 shock Effects 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明祉耐衝撃性が良好で作業性、経時変化特性の優れ
た。比較的高い共振周波数の水晶振動子に関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention has good impact resistance, workability, and excellent aging characteristics. It relates to a crystal resonator with a relatively high resonant frequency.
従来、たとえはＡＴカットの厚みすベシ水晶振動子では
、水晶の結晶軸に対して所定角度に切断した円板状の水
晶片を用いる。そしてこの水晶片の中央部に金（Ａｕ）
、銀（Ａ））、アルミニウム（Ａｌ）等からなる電極を
蒸着等により形成する。さらに保持用のリード端子の先
端に形成したスリットに上記水晶片の両端縁をさし込ん
で、ここに上記電極を導出し、このリード端子を介して
厚みすベシ振動を励振するようにしている。Conventionally, for example, an AT-cut thick-beam crystal resonator uses a disc-shaped crystal piece cut at a predetermined angle with respect to the crystal axis of the crystal. Gold (Au) is placed in the center of this crystal piece.
, silver (A)), aluminum (Al), etc., is formed by vapor deposition or the like. Furthermore, both ends of the crystal piece are inserted into a slit formed at the tip of a holding lead terminal, the electrode is led out here, and thickness-beam vibration is excited through this lead terminal. .
しかしながらこのようなものでは、リード亀子に水晶片
をさし込む際の応力により生じる歪のために発振周波数
が変動し易い。また厚みの薄い水晶片の場合＆落下、外
部からの衝撃尋により破損し易い。さらに水晶片の板面
の電極と水晶片との境界に発生する歪のために発振周波
数が変動する問題もあった。However, in such a device, the oscillation frequency tends to fluctuate due to distortion caused by stress when inserting the crystal piece into the lead frame. Also, if the crystal piece is thin, it is easily damaged by falling or external impact. Furthermore, there is a problem in that the oscillation frequency fluctuates due to distortion occurring at the boundary between the electrode on the plate surface of the crystal blank and the crystal blank.
このためにり−・ド端子の曲り、平行度、ねじれ等を厳
しく管理して水晶片に歪を与えないようにする必要があ
った。そして水晶片に歪応力が作用しｆｃ′ｊａ合は、
水晶片の電気的、機械的な特性を劣化させる問題があっ
た。For this reason, it was necessary to strictly control the bending, parallelism, twisting, etc. of the lead/de terminals so as not to cause distortion to the crystal blank. Then, when the strain stress acts on the crystal piece and fc′ja,
There was a problem in that the electrical and mechanical properties of the crystal piece deteriorated.
本発明は上記の事情に鑑みてなされたもので水晶片の機
械的な強度を高め得、それによって水晶片に作用する歪
応力を軽減することができ、しかも経年変化による特性
の劣化を防止でき電気的１機械的な特性が良好でしかも
特性劣化の少ない水晶振動＋、煮提供することを目的と
するものである。The present invention has been made in view of the above circumstances, and can increase the mechanical strength of the crystal blank, thereby reducing the strain stress acting on the crystal blank, and also preventing the deterioration of characteristics due to aging. The purpose is to provide a crystal oscillation device with good electrical and mechanical characteristics and less deterioration of the characteristics.
本発明は、圧電振動を励振する水晶片の両側に密着して
対向面に電極膜を有する凹面に形成した電極片を設けた
ことを特徴とするものでおる。The present invention is characterized in that concave electrode pieces having electrode films on opposing surfaces are provided in close contact with both sides of a crystal piece that excites piezoelectric vibrations.
以下本発明の一実施例を図面を参照して詳細に説明する
。１１．ｘ図は本発明の一実施例の水晶振動子を示す断
面図を参照して詳細に説明する。An embodiment of the present invention will be described in detail below with reference to the drawings. 11. FIG.
図中ｘｆｉ圧電振動を励振する水晶片である。この水晶
片は、たとえば水晶の２軸をＹ軸の方向へ約３５８１５
’だけ回転した２′軸に直交する面から切り出したＡＴ
カットの水晶片である。そして２は上記水晶片１の両側
板面に密着して設けた一対の電極片である。各電極片２
は水晶片ｌとの対向面を凹面２ノに形成するとともにこ
の凹面に電極膜２：ｌ’に形成している。なおこの電極
片２は水晶、ガラス尋上記水晶片１の熱膨張率に略等し
い熱膨張率を有する絶縁材を用いることか望ましい。し
たがって水晶の２軸に直交する面から切り出したｚ板り
熱膨張率をほぼ等しくしかも圧電特性を示さないので電
極片２として好都合である。そしてこの電極片２の凹面
２ノは、たとえばエツチングによって形成すればよい。In the figure, xfi is a crystal piece that excites piezoelectric vibration. This crystal piece, for example, moves the two axes of the crystal in the Y-axis direction by approximately 35,815 mm.
AT cut out from a plane perpendicular to the 2' axis rotated by '
It is a cut crystal piece. Reference numeral 2 denotes a pair of electrode pieces provided in close contact with both side plate surfaces of the crystal piece 1. Each electrode piece 2
The surface facing the crystal blank l is formed into a concave surface 2, and an electrode film 2:l' is formed on this concave surface. It is preferable that the electrode piece 2 is made of quartz or a glass insulating material having a coefficient of thermal expansion approximately equal to that of the crystal piece 1. Therefore, the Z-plate cut out from the plane perpendicular to the two axes of the crystal has approximately the same coefficient of thermal expansion and exhibits no piezoelectric properties, making it suitable for use as the electrode piece 2. The concave surface 2 of the electrode piece 2 may be formed by etching, for example.
たとえは基本波が３０ＭＨｚＯＡＴカットの水晶振動子
では水晶片１の厚みは約５０μｍである。そしてこの両
側板面に同様にＡＴカットの水晶板からなる電極片２を
設ける場合、その厚みを０．１ ｍとすれば凹面２ノの
深さは２０μｍ程度でよい。そして、この場合、振動子
、全体の厚み抹約０．２５ ｗｘとなシ、その機械的な
強度全大幅に増すことができる。そして上記電極膜２２
を外部へ導出して厚みすべ〕振動を励振することができ
る。For example, in a crystal resonator whose fundamental wave is 30 MHz OAT cut, the thickness of the crystal piece 1 is about 50 μm. When electrode pieces 2 made of AT-cut quartz plates are similarly provided on both side plate surfaces, if the thickness is 0.1 m, the depth of the concave surfaces 2 may be about 20 μm. In this case, the total thickness of the vibrator is approximately 0.25 wx, and its mechanical strength can be greatly increased. And the electrode film 22
can be led out to the outside to excite vibrations.
また水晶片１には電極が密着することなく空隙を存して
電極ｍ２２が対面するので水晶片１の振動を阻害するこ
となく、かつ電極の酸化等による経時的な変化の影１１
を受けることがなくそれによりて周波数の変動を防止す
ることができる。In addition, since the electrode m22 faces the crystal blank 1 with a gap between the electrodes and the electrode does not come into close contact with the crystal blank 1, the vibration of the crystal blank 1 is not inhibited, and the shadow 11 of changes over time due to oxidation of the electrode etc.
Therefore, frequency fluctuations can be prevented.
また水晶片ｌの振動を阻害しないためには凹所２１の深
さは２０μｍで充分であり、エツチング等の手法によっ
て容易に実現することができる。Further, in order not to impede the vibration of the crystal piece l, the depth of the recess 21 is sufficient to be 20 μm, and this can be easily realized by a technique such as etching.
なおこのような構成の水晶振動子の周波数応答は、たと
えば第２図に示すように水晶片１の主共振周波数ｆ、と
電極片２によって生じる副共振周波数ｆ、と金主じる。The frequency response of a crystal resonator having such a configuration is, for example, as shown in FIG. 2, consisting of a main resonant frequency f of the crystal piece 1 and a sub-resonant frequency f generated by the electrode piece 2.
しかしながら電極片２に充分な強度を得られるように板
厚の厚いものを用いることにより副共振周波数１２０周
波数を低くし、かつ等価抵抗を大きくでき問題とはなら
ない。なお水晶片１と％極片２は熱膨張率の略等しいも
のを用いることによ多温度特性への悪影響も除去できる
。However, by using a thick plate so as to obtain sufficient strength for the electrode piece 2, the sub-resonant frequency 120 can be lowered and the equivalent resistance can be increased, thereby causing no problem. By using crystal piece 1 and pole piece 2 having substantially the same coefficient of thermal expansion, the adverse effect on multi-temperature characteristics can also be eliminated.
第３囚絋本発明を応用した水晶振動子の一例を示す図で
一方の電極片２をペース３に接漸剤等により散着する。The third example is a diagram showing an example of a crystal oscillator to which the present invention is applied, in which one electrode piece 2 is sprinkled on a paste 3 using an adhesive or the like.
そしてこのペース３に貫装した一対の端子３ｘｆリード
１Ｍ５ｚを介して電極片２の電極膜２２に接続する。そ
して上記ペース３に図示しないキャップをかぶせること
によシ外形形状を従来の金属ケースに収納した水晶振動
子と同様にできる。Then, it is connected to the electrode film 22 of the electrode piece 2 via a pair of terminals 3xf leads 1M5z inserted through the paste 3. By covering the pace 3 with a cap (not shown), the external shape can be made similar to that of a conventional crystal resonator housed in a metal case.
第４図は本発明の他の夾施例を示す側面図で。FIG. 4 is a side view showing another embodiment of the present invention.
ペース３はアルミナの表面に適宜に電極膜を形成したも
のである。このようにすれば、たとえに外周を適当な樹
脂等で直接モールＰしても水晶片ｌの振動特性を損なう
仁とがなく、全体をリード端子管省略したテクノ部品に
成形することができる。Paste 3 has an appropriate electrode film formed on the surface of alumina. In this way, even if the outer periphery is directly molded with a suitable resin or the like, there will be no cracks that will impair the vibration characteristics of the crystal piece l, and the entire piece can be molded into a techno part without the lead terminal tube.
以上のように本発明によれば特に水晶片の機械的強度を
向上し、耐振・耐衝撃性が良好で経時変化が少なく電気
的１機械的な特性の安定な水晶振動子を提供することか
できる。As described above, according to the present invention, it is possible to provide a crystal resonator which improves the mechanical strength of the crystal piece in particular, has good vibration resistance and impact resistance, and has stable electrical and mechanical characteristics with little change over time. can.
第１図り本発明の一実施例を示す断面図、第２囚社第１
図に示す水晶振動子の周波敷石等を示す図、第３図、、
第４図は本発明の水晶振動子の各別の一例を示す図であ
る。
１・・・水晶片、２・・・電極片、２ノ・・・凹面、２
２・・・ｔｆｆｌ膜、ｓ・・・ペース。1st drawing A sectional view showing an embodiment of the present invention, 2nd prisoner company 1st
Figure 3 shows the frequency paving stones of the crystal oscillator shown in the figure.
FIG. 4 is a diagram showing different examples of the crystal resonator of the present invention. 1... Crystal piece, 2... Electrode piece, 2... Concave surface, 2
2...tffl membrane, s...pace.
Claims (6)
側に密着して設けられかつ水晶片との対向面を凹面に形
成するとともにこの凹面に電極膜を設けた一対の電極片
とを具備する水晶振動子。(1) A crystal piece that is excited with piezoelectric vibration, and a pair of electrode pieces that are provided in close contact with both sides of this crystal piece and have a concave surface facing the crystal piece, and an electrode film is provided on this concave surface. A crystal oscillator equipped with.
の電極片の熱膨張率は水晶片に等しいことを特徴とする
水晶振動子。(2) A crystal resonator according to claim 1, characterized in that the coefficient of thermal expansion of the pair of electrode pieces is equal to that of the crystal piece.
の電極片はガラスからなることを特徴とする水晶振動子
。(3) A crystal resonator according to claim 1, wherein the pair of electrode pieces is made of glass.
の電極片は水晶板からなることを特徴とする水晶振動子
。(4) A crystal resonator according to claim 1, wherein the pair of electrode pieces is made of a crystal plate.
ることを特徴とする水晶振動子。(5) A crystal resonator, wherein the crystal piece according to claim 1 is an AT plate.
の電極片はＺ板であることを特徴とする水晶振動子。(6) A crystal resonator according to claim 5, wherein the pair of electrode pieces is a Z plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16303184A JPS6141215A (en) | 1984-07-31 | 1984-07-31 | Crystal resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16303184A JPS6141215A (en) | 1984-07-31 | 1984-07-31 | Crystal resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6141215A true JPS6141215A (en) | 1986-02-27 |
Family
ID=15765869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16303184A Pending JPS6141215A (en) | 1984-07-31 | 1984-07-31 | Crystal resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6141215A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253313A (en) * | 1988-08-18 | 1990-02-22 | Fujitsu Ltd | Vibrator |
| JPH0257009A (en) * | 1988-08-23 | 1990-02-26 | Yokogawa Electric Corp | Piezoelectric resonator |
| JPH03139912A (en) * | 1989-10-25 | 1991-06-14 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
| JPH06291587A (en) * | 1992-07-08 | 1994-10-18 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator |
| JPH06291589A (en) * | 1992-04-15 | 1994-10-18 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator and manufacture of the same |
| US5596239A (en) * | 1995-06-29 | 1997-01-21 | Motorola, Inc. | Enhanced quality factor resonator |
| US5668057A (en) * | 1991-03-13 | 1997-09-16 | Matsushita Electric Industrial Co., Ltd. | Methods of manufacture for electronic components having high-frequency elements |
| US5747857A (en) * | 1991-03-13 | 1998-05-05 | Matsushita Electric Industrial Co., Ltd. | Electronic components having high-frequency elements and methods of manufacture therefor |
| JP2002118440A (en) * | 2000-10-04 | 2002-04-19 | Toyo Commun Equip Co Ltd | Piezoelectric transducer |
| US8350449B2 (en) | 2010-03-30 | 2013-01-08 | Nihon Dempa Kogyo Co., Ltd. | Quartz crystal device using at-cut quartz substrate and manufacturing the same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52123888A (en) * | 1976-04-12 | 1977-10-18 | Matsushima Kogyo Kk | Thickness slip quartz oscillator |
| US4135108A (en) * | 1976-01-16 | 1979-01-16 | L'Etat Francais represente par le Delegue Ministeriel | Quartz resonator with electrodes that do not adhere to the crystal |
| JPS5550721A (en) * | 1978-10-09 | 1980-04-12 | France Etat | Piezooelectric twin resonator |
-
1984
- 1984-07-31 JP JP16303184A patent/JPS6141215A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4135108A (en) * | 1976-01-16 | 1979-01-16 | L'Etat Francais represente par le Delegue Ministeriel | Quartz resonator with electrodes that do not adhere to the crystal |
| JPS52123888A (en) * | 1976-04-12 | 1977-10-18 | Matsushima Kogyo Kk | Thickness slip quartz oscillator |
| JPS5550721A (en) * | 1978-10-09 | 1980-04-12 | France Etat | Piezooelectric twin resonator |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253313A (en) * | 1988-08-18 | 1990-02-22 | Fujitsu Ltd | Vibrator |
| JPH0257009A (en) * | 1988-08-23 | 1990-02-26 | Yokogawa Electric Corp | Piezoelectric resonator |
| JPH03139912A (en) * | 1989-10-25 | 1991-06-14 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator |
| US5668057A (en) * | 1991-03-13 | 1997-09-16 | Matsushita Electric Industrial Co., Ltd. | Methods of manufacture for electronic components having high-frequency elements |
| US5747857A (en) * | 1991-03-13 | 1998-05-05 | Matsushita Electric Industrial Co., Ltd. | Electronic components having high-frequency elements and methods of manufacture therefor |
| JPH06291589A (en) * | 1992-04-15 | 1994-10-18 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator and manufacture of the same |
| JPH06291587A (en) * | 1992-07-08 | 1994-10-18 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator |
| EP0797300A1 (en) * | 1992-07-08 | 1997-09-24 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator and manufacturing method thereof |
| US5548178A (en) * | 1992-07-08 | 1996-08-20 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator and manufacturing method thereof |
| US5596239A (en) * | 1995-06-29 | 1997-01-21 | Motorola, Inc. | Enhanced quality factor resonator |
| US5884378A (en) * | 1995-06-29 | 1999-03-23 | Motorola, Inc. | Method of making an enhanced quality factor resonator |
| JP2002118440A (en) * | 2000-10-04 | 2002-04-19 | Toyo Commun Equip Co Ltd | Piezoelectric transducer |
| US8350449B2 (en) | 2010-03-30 | 2013-01-08 | Nihon Dempa Kogyo Co., Ltd. | Quartz crystal device using at-cut quartz substrate and manufacturing the same |
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