JPS62147338U - - Google Patents

Info

Publication number
JPS62147338U
JPS62147338U JP3522186U JP3522186U JPS62147338U JP S62147338 U JPS62147338 U JP S62147338U JP 3522186 U JP3522186 U JP 3522186U JP 3522186 U JP3522186 U JP 3522186U JP S62147338 U JPS62147338 U JP S62147338U
Authority
JP
Japan
Prior art keywords
plating
electrode
semiconductor substrate
substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3522186U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3522186U priority Critical patent/JPS62147338U/ja
Publication of JPS62147338U publication Critical patent/JPS62147338U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第1図は本考案の一実施例の断面図、第2図は
従来装置の断面図、第3図は従来装置により電極
めつきを行つたシリコンウエハの平面図である。 1:めつき槽、2:シリコンウエハ、3:めつ
き液、4:陽極、5:陰極、8:環状支持体。

Claims (1)

    【実用新案登録請求の範囲】
  1. めつき槽に収容されためつき液に半導体基板の
    一面を接触させ、めつき液中に置かれた電極と基
    板の上に載置された電極の間に電圧を印加して半
    導体基板の一面上に電極を形成するものにおいて
    、絶縁材料からなりL字状断面を有し、内面で半
    導体基板を支持する環状支持体がめつき槽側壁に
    よつて支持されたことを特徴とする半導体電極め
    つき装置。
JP3522186U 1986-03-11 1986-03-11 Pending JPS62147338U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3522186U JPS62147338U (ja) 1986-03-11 1986-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3522186U JPS62147338U (ja) 1986-03-11 1986-03-11

Publications (1)

Publication Number Publication Date
JPS62147338U true JPS62147338U (ja) 1987-09-17

Family

ID=30844512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3522186U Pending JPS62147338U (ja) 1986-03-11 1986-03-11

Country Status (1)

Country Link
JP (1) JPS62147338U (ja)

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