JPS62139869A - マグネトロン型スパツタカソ−ド - Google Patents

マグネトロン型スパツタカソ−ド

Info

Publication number
JPS62139869A
JPS62139869A JP60277899A JP27789985A JPS62139869A JP S62139869 A JPS62139869 A JP S62139869A JP 60277899 A JP60277899 A JP 60277899A JP 27789985 A JP27789985 A JP 27789985A JP S62139869 A JPS62139869 A JP S62139869A
Authority
JP
Japan
Prior art keywords
magnetic flux
point
target
circumferential magnet
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60277899A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0366389B2 (enrdf_load_stackoverflow
Inventor
Akira Minami
明 南
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP60277899A priority Critical patent/JPS62139869A/ja
Publication of JPS62139869A publication Critical patent/JPS62139869A/ja
Publication of JPH0366389B2 publication Critical patent/JPH0366389B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP60277899A 1985-12-12 1985-12-12 マグネトロン型スパツタカソ−ド Granted JPS62139869A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60277899A JPS62139869A (ja) 1985-12-12 1985-12-12 マグネトロン型スパツタカソ−ド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60277899A JPS62139869A (ja) 1985-12-12 1985-12-12 マグネトロン型スパツタカソ−ド

Publications (2)

Publication Number Publication Date
JPS62139869A true JPS62139869A (ja) 1987-06-23
JPH0366389B2 JPH0366389B2 (enrdf_load_stackoverflow) 1991-10-17

Family

ID=17589840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60277899A Granted JPS62139869A (ja) 1985-12-12 1985-12-12 マグネトロン型スパツタカソ−ド

Country Status (1)

Country Link
JP (1) JPS62139869A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0366389B2 (enrdf_load_stackoverflow) 1991-10-17

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