JPS6213617B2 - - Google Patents

Info

Publication number
JPS6213617B2
JPS6213617B2 JP54126629A JP12662979A JPS6213617B2 JP S6213617 B2 JPS6213617 B2 JP S6213617B2 JP 54126629 A JP54126629 A JP 54126629A JP 12662979 A JP12662979 A JP 12662979A JP S6213617 B2 JPS6213617 B2 JP S6213617B2
Authority
JP
Japan
Prior art keywords
chip
inspected
light
throw
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54126629A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5648544A (en
Inventor
Yoshinobu Kashiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP12662979A priority Critical patent/JPS5648544A/ja
Publication of JPS5648544A publication Critical patent/JPS5648544A/ja
Publication of JPS6213617B2 publication Critical patent/JPS6213617B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
JP12662979A 1979-09-28 1979-09-28 Crack detector Granted JPS5648544A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12662979A JPS5648544A (en) 1979-09-28 1979-09-28 Crack detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12662979A JPS5648544A (en) 1979-09-28 1979-09-28 Crack detector

Publications (2)

Publication Number Publication Date
JPS5648544A JPS5648544A (en) 1981-05-01
JPS6213617B2 true JPS6213617B2 (enrdf_load_stackoverflow) 1987-03-27

Family

ID=14939917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12662979A Granted JPS5648544A (en) 1979-09-28 1979-09-28 Crack detector

Country Status (1)

Country Link
JP (1) JPS5648544A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5157735A (en) * 1988-09-09 1992-10-20 Hitachi, Ltd. Chipping detection system and method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135879B2 (enrdf_load_stackoverflow) * 1973-07-31 1976-10-05
JPS5841459B2 (ja) * 1974-10-28 1983-09-12 キヤノン株式会社 ブツタイリヨウブケツカンケンサホウホウ

Also Published As

Publication number Publication date
JPS5648544A (en) 1981-05-01

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