JPS62132322A - エッチング装置 - Google Patents

エッチング装置

Info

Publication number
JPS62132322A
JPS62132322A JP27306285A JP27306285A JPS62132322A JP S62132322 A JPS62132322 A JP S62132322A JP 27306285 A JP27306285 A JP 27306285A JP 27306285 A JP27306285 A JP 27306285A JP S62132322 A JPS62132322 A JP S62132322A
Authority
JP
Japan
Prior art keywords
cassette
etching
dedicated
etched
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27306285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH051975B2 (enExample
Inventor
Yoshikazu Maegaki
嘉一 前垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP27306285A priority Critical patent/JPS62132322A/ja
Publication of JPS62132322A publication Critical patent/JPS62132322A/ja
Publication of JPH051975B2 publication Critical patent/JPH051975B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP27306285A 1985-12-04 1985-12-04 エッチング装置 Granted JPS62132322A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27306285A JPS62132322A (ja) 1985-12-04 1985-12-04 エッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27306285A JPS62132322A (ja) 1985-12-04 1985-12-04 エッチング装置

Publications (2)

Publication Number Publication Date
JPS62132322A true JPS62132322A (ja) 1987-06-15
JPH051975B2 JPH051975B2 (enExample) 1993-01-11

Family

ID=17522617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27306285A Granted JPS62132322A (ja) 1985-12-04 1985-12-04 エッチング装置

Country Status (1)

Country Link
JP (1) JPS62132322A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5294572A (en) * 1989-03-06 1994-03-15 Asm International N.V. Method and apparatus for depositing a layer on a substrate

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024094733A1 (en) 2022-11-04 2024-05-10 Basf Se Polypeptides having protease activity for use in detergent compositions

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759345A (en) * 1980-09-26 1982-04-09 Mitsubishi Electric Corp Feeder for semiconductor substrate
JPS5831532A (ja) * 1981-08-18 1983-02-24 Nec Corp プラズマ処理装置
JPS60196946A (ja) * 1984-03-21 1985-10-05 Hitachi Ltd プラズマ処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759345A (en) * 1980-09-26 1982-04-09 Mitsubishi Electric Corp Feeder for semiconductor substrate
JPS5831532A (ja) * 1981-08-18 1983-02-24 Nec Corp プラズマ処理装置
JPS60196946A (ja) * 1984-03-21 1985-10-05 Hitachi Ltd プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5294572A (en) * 1989-03-06 1994-03-15 Asm International N.V. Method and apparatus for depositing a layer on a substrate

Also Published As

Publication number Publication date
JPH051975B2 (enExample) 1993-01-11

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees