JPS6213051Y2 - - Google Patents

Info

Publication number
JPS6213051Y2
JPS6213051Y2 JP1979079889U JP7988979U JPS6213051Y2 JP S6213051 Y2 JPS6213051 Y2 JP S6213051Y2 JP 1979079889 U JP1979079889 U JP 1979079889U JP 7988979 U JP7988979 U JP 7988979U JP S6213051 Y2 JPS6213051 Y2 JP S6213051Y2
Authority
JP
Japan
Prior art keywords
substrate
inspected
fixing frame
jig
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979079889U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55179351U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979079889U priority Critical patent/JPS6213051Y2/ja
Publication of JPS55179351U publication Critical patent/JPS55179351U/ja
Application granted granted Critical
Publication of JPS6213051Y2 publication Critical patent/JPS6213051Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1979079889U 1979-06-12 1979-06-12 Expired JPS6213051Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979079889U JPS6213051Y2 (enrdf_load_stackoverflow) 1979-06-12 1979-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979079889U JPS6213051Y2 (enrdf_load_stackoverflow) 1979-06-12 1979-06-12

Publications (2)

Publication Number Publication Date
JPS55179351U JPS55179351U (enrdf_load_stackoverflow) 1980-12-23
JPS6213051Y2 true JPS6213051Y2 (enrdf_load_stackoverflow) 1987-04-04

Family

ID=29313260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979079889U Expired JPS6213051Y2 (enrdf_load_stackoverflow) 1979-06-12 1979-06-12

Country Status (1)

Country Link
JP (1) JPS6213051Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS55179351U (enrdf_load_stackoverflow) 1980-12-23

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