JPS6213051Y2 - - Google Patents
Info
- Publication number
- JPS6213051Y2 JPS6213051Y2 JP1979079889U JP7988979U JPS6213051Y2 JP S6213051 Y2 JPS6213051 Y2 JP S6213051Y2 JP 1979079889 U JP1979079889 U JP 1979079889U JP 7988979 U JP7988979 U JP 7988979U JP S6213051 Y2 JPS6213051 Y2 JP S6213051Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- inspected
- fixing frame
- jig
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 29
- 238000007689 inspection Methods 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979079889U JPS6213051Y2 (enrdf_load_html_response) | 1979-06-12 | 1979-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979079889U JPS6213051Y2 (enrdf_load_html_response) | 1979-06-12 | 1979-06-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55179351U JPS55179351U (enrdf_load_html_response) | 1980-12-23 |
| JPS6213051Y2 true JPS6213051Y2 (enrdf_load_html_response) | 1987-04-04 |
Family
ID=29313260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979079889U Expired JPS6213051Y2 (enrdf_load_html_response) | 1979-06-12 | 1979-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6213051Y2 (enrdf_load_html_response) |
-
1979
- 1979-06-12 JP JP1979079889U patent/JPS6213051Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55179351U (enrdf_load_html_response) | 1980-12-23 |
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