JPS621281A - 非晶質シリコン薄膜の製造方法 - Google Patents

非晶質シリコン薄膜の製造方法

Info

Publication number
JPS621281A
JPS621281A JP61121269A JP12126986A JPS621281A JP S621281 A JPS621281 A JP S621281A JP 61121269 A JP61121269 A JP 61121269A JP 12126986 A JP12126986 A JP 12126986A JP S621281 A JPS621281 A JP S621281A
Authority
JP
Japan
Prior art keywords
amorphous silicon
substrate
thin film
silicon thin
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61121269A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0368546B2 (esLanguage
Inventor
Hiroshi Okaniwa
宏 岡庭
Kenji Nakatani
健司 中谷
Mitsuo Asano
浅野　光夫
Wataru Yamamoto
渉 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP61121269A priority Critical patent/JPS621281A/ja
Publication of JPS621281A publication Critical patent/JPS621281A/ja
Publication of JPH0368546B2 publication Critical patent/JPH0368546B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP61121269A 1986-05-28 1986-05-28 非晶質シリコン薄膜の製造方法 Granted JPS621281A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61121269A JPS621281A (ja) 1986-05-28 1986-05-28 非晶質シリコン薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61121269A JPS621281A (ja) 1986-05-28 1986-05-28 非晶質シリコン薄膜の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5289380A Division JPS56150874A (en) 1980-04-23 1980-04-23 Method of continuously manufacturing amorphous silicon solar battery

Publications (2)

Publication Number Publication Date
JPS621281A true JPS621281A (ja) 1987-01-07
JPH0368546B2 JPH0368546B2 (esLanguage) 1991-10-28

Family

ID=14807070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61121269A Granted JPS621281A (ja) 1986-05-28 1986-05-28 非晶質シリコン薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS621281A (esLanguage)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053828U (ja) * 1991-06-26 1993-01-22 三洋電機株式会社 加湿機
JP2013527623A (ja) * 2010-06-02 2013-06-27 セントレ ナショナル デ ラ ルシェルシェ サイエンティフィック−シーエヌアールエス 集光太陽束下で使用される太陽光発電部品

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053828U (ja) * 1991-06-26 1993-01-22 三洋電機株式会社 加湿機
JP2013527623A (ja) * 2010-06-02 2013-06-27 セントレ ナショナル デ ラ ルシェルシェ サイエンティフィック−シーエヌアールエス 集光太陽束下で使用される太陽光発電部品

Also Published As

Publication number Publication date
JPH0368546B2 (esLanguage) 1991-10-28

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