JPS62128130A - Wire bonding method - Google Patents
Wire bonding methodInfo
- Publication number
- JPS62128130A JPS62128130A JP60267250A JP26725085A JPS62128130A JP S62128130 A JPS62128130 A JP S62128130A JP 60267250 A JP60267250 A JP 60267250A JP 26725085 A JP26725085 A JP 26725085A JP S62128130 A JPS62128130 A JP S62128130A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- bonding
- ball
- capillary
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85009—Pre-treatment of the connector or the bonding area
- H01L2224/8503—Reshaping, e.g. forming the ball or the wedge of the wire connector
- H01L2224/85035—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball"
- H01L2224/85045—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball" using a corona discharge, e.g. electronic flame off [EFO]
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用性!!?]
本発明は熱圧着ワイヤポンダ、熱圧着超音波併用ワイヤ
ホンダ等によるワイヤボンディング方法に関する。[Detailed description of the invention] [Industrial applicability! ! ? ] The present invention relates to a wire bonding method using a thermocompression wire bonder, a thermocompression bonding ultrasonic wire bonder, etc.
[従来の技術]
周知の如く、ワイヤホンダは、リードフレーム上にペレ
ットが固着されたワークの第1ボンド点と第2ボンド点
にワイヤを接続するために用いられる。かかるワイヤポ
ンダの内、熱圧着ワイヤホンダ、熱圧着超音波併用ワイ
ヤポンダ等においては、ワークの第1ボンド点にワイヤ
ボンディングを行うに当り、キャピラリに挿通されてキ
ャピラリより突出したワイヤの先端に電気トーチで放電
してボールが形成される。[Prior Art] As is well known, a wire honda is used to connect a wire to a first bond point and a second bond point of a workpiece having a pellet fixed to a lead frame. Among such wire bonders, thermocompression bonding wire Honda, thermocompression bonding ultrasonic wire bonder, etc., when performing wire bonding to the first bonding point of the work, an electric torch is used to touch the tip of the wire that has been inserted into the capillary and protrudes from the capillary. A ball is formed due to the discharge.
従来、ワークの最初の第1ボンド点へのワイヤボンディ
ングは、ワークがボンディング位置へ送られてくる途中
でキャピラリの先端に突出したワイヤ先端に電気トーチ
の放電によってボールを形成し、ワークが位置決めされ
た後にキャピラリをr降させてワイヤボンディングを行
っていた。またワークの第2番目、:i43番目・・・
・の第1ボンド点へのワイヤボンディングは、その前の
第2ボンド点のワイヤボンディングが終了し、ワイヤが
第2ボンド点の付根で切断された後に電気トーチの放電
によってボールが形成されて行われる。Conventionally, in wire bonding to the first bonding point of a workpiece, a ball is formed at the tip of the wire protruding from the tip of a capillary while the workpiece is being sent to the bonding position, and the workpiece is positioned by discharging an electric torch. After that, the capillary was lowered and wire bonding was performed. Also, the second part of the work: i43rd...
Wire bonding to the first bond point is performed by forming a ball by discharging an electric torch after the wire bonding of the previous second bond point is completed and the wire is cut at the root of the second bond point. be exposed.
[発明が解決しようとする問題点]
ところで、最近になって、ワークの最初の第1ボンド点
へのワイヤボンディングについては、ワイヤのはがれ(
不着)が多いことが判った。この原因は判明すれば非常
に単純なことであるが、当業者においては頭をなやまし
ていたのが実情である。本出願人は、種々実験の結果、
次のようなことをつきとめた。[Problems to be Solved by the Invention] Recently, wire bonding to the first bonding point of a workpiece has been caused by wire peeling (
It was found that there were many cases of non-delivery. The cause of this problem would be very simple if it were known, but the reality is that it has puzzled those skilled in the art. As a result of various experiments, the applicant has discovered that
The following findings were made.
ワークの第2番目、第3番目・・・・の第1ボンド点へ
のワイヤはがれは生じないのに、ワイヤの最初の第1ボ
ンド点のみのはがれが多いことに着目した。ワークの第
2番目、第3番目・・・・の第1ボンド点へのワイヤボ
ンディングは、ワークの送り時間がなく、ボールを形成
した後に直ちにワイヤボンディングするので、ボールが
暖まった状態にあるために良好なワイヤボンディングが
行われると思われる。It was noticed that although the wire did not peel off to the second, third, etc. first bond points of the workpiece, only the first bond point of the wire often peeled off. When wire bonding to the first bond point of the second, third, etc. of the workpiece, there is no time to feed the workpiece, and wire bonding is performed immediately after forming the ball, so the ball is in a warm state. It seems that good wire bonding is possible.
しかし、ワークの最初の第1ボンド点へのワイヤボンデ
ィングは、トータル的なワイヤボンディング時間を短縮
するために、ワークがボンディング位置へ送られてくる
途中でボールを形成している。このため、ワイヤボンデ
ィング時にはボールの温度が下って硬化するので、ポン
ダビリティが悪く、ワイヤのはがれが発生し易い。However, in wire bonding to the first bonding point of the workpiece, a ball is formed while the workpiece is being sent to the bonding position in order to shorten the total wire bonding time. For this reason, during wire bonding, the temperature of the ball decreases and hardens it, resulting in poor bondability and easy peeling of the wire.
本発明の目的は、ポンダビリティに優れ、ワイヤはがれ
が防止されるワイヤボンディング方法を提供することに
ある。An object of the present invention is to provide a wire bonding method that has excellent bondability and prevents wire peeling.
[問題点を解決するための手段]
上記従来技術の問題点は、ワークが移送されてボンディ
ング位置に位置決めされた後で、ワークの最初の第1ボ
ンド点にワイヤボンディングを行う直前に、キャピラリ
に挿通されたワイヤの先端に電気トーチで放電してボー
ルを形成しワイヤボンディングを行うことによって解消
される。[Means for solving the problem] The problem with the above conventional technology is that after the workpiece is transferred and positioned at the bonding position, immediately before wire bonding is performed on the first bonding point of the workpiece, the capillary is This problem can be solved by discharging the tip of the inserted wire with an electric torch to form a ball and performing wire bonding.
[実施例]
以下、本発明のワイヤボンディング方法の一実施例につ
いで説明する。ワークがボンディング位置に送られて位
置決めされた後に、キャピラリより突出したワイヤの先
端に電気トーチの放電によってボールを形成し、その後
直ちにキャピラリを下降させてワークの最初の第1ボン
ド点にワイヤボンディングを行う、ここで、ボール形成
時にはキャピラリからワイヤが抜けないようにクランパ
でワイヤをクランプした状態にしておく。ボール形成後
にはクランパは開状態にする。[Example] Hereinafter, an example of the wire bonding method of the present invention will be described. After the workpiece is sent to the bonding position and positioned, a ball is formed at the tip of the wire protruding from the capillary by discharging an electric torch, and then the capillary is immediately lowered to perform wire bonding at the first bonding point on the workpiece. At this point, the wire is clamped with a clamper to prevent it from coming off the capillary when forming the ball. After the ball is formed, the clamper is opened.
このように、ワークの最初の第1ボンド点にワイヤボン
ディングする直前にボールを形成するので、ボールは温
度が下らない内にワイヤボンディングされる。これによ
り、ポンダビリティが向上し、ワイヤはがれが殆ど少な
くなった。In this way, since the ball is formed immediately before wire bonding to the first bonding point of the work, the ball can be wire bonded before the temperature drops. This improved the pondability and reduced wire peeling.
なお、ワイヤポンダがワイヤボンディング途中で停止し
た場合は、再度ボンディングスタートをさせ、キャピラ
リがボンディングのために下降する直前にボールを形成
するようにする。Note that if the wire bonder stops during wire bonding, bonding is restarted so that a ball is formed just before the capillary descends for bonding.
[発明の効果]
以上の説明から明らかなように、本発明によれば、ワー
クが移送されてボンディング位置に位置決めされた後で
、ワークの最初の第1ボンド点にワイヤボンディングを
行う直前に、キャピラリに挿通されたワイヤの先端に電
気トーチで放電してボールを形成しワイヤボンディング
を行うので、ポンダビリティに優れ、ワイヤはがれが防
止される。[Effects of the Invention] As is clear from the above description, according to the present invention, after the workpiece is transferred and positioned at the bonding position, immediately before wire bonding is performed at the first bonding point of the workpiece, Wire bonding is performed by discharging the tip of the wire inserted into the capillary with an electric torch to form a ball, which provides excellent bondability and prevents the wire from peeling off.
Claims (1)
後で、ワークの最初の第1ボンド点にワイヤボンディン
グを行う直前に、キャピラリに挿通されたワイヤの先端
に電気トーチで放電してボールを形成しワイヤボンディ
ングを行うことを特徴とするワイヤボンディング方法。After the workpiece has been transferred and positioned at the bonding position, immediately before wire bonding is performed at the first bonding point on the workpiece, an electric torch is used to discharge electricity at the tip of the wire inserted into the capillary to form a ball. A wire bonding method characterized by performing bonding.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60267250A JPS62128130A (en) | 1985-11-29 | 1985-11-29 | Wire bonding method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60267250A JPS62128130A (en) | 1985-11-29 | 1985-11-29 | Wire bonding method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62128130A true JPS62128130A (en) | 1987-06-10 |
JPH0418697B2 JPH0418697B2 (en) | 1992-03-27 |
Family
ID=17442217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60267250A Granted JPS62128130A (en) | 1985-11-29 | 1985-11-29 | Wire bonding method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62128130A (en) |
-
1985
- 1985-11-29 JP JP60267250A patent/JPS62128130A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0418697B2 (en) | 1992-03-27 |
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