JPS62128109A - 高透磁率積層膜の製造方法 - Google Patents
高透磁率積層膜の製造方法Info
- Publication number
- JPS62128109A JPS62128109A JP26726385A JP26726385A JPS62128109A JP S62128109 A JPS62128109 A JP S62128109A JP 26726385 A JP26726385 A JP 26726385A JP 26726385 A JP26726385 A JP 26726385A JP S62128109 A JPS62128109 A JP S62128109A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- permeability
- magnetic field
- film
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000010030 laminating Methods 0.000 title description 3
- 230000005291 magnetic effect Effects 0.000 claims abstract description 97
- 239000010408 film Substances 0.000 claims abstract description 43
- 230000035699 permeability Effects 0.000 claims abstract description 42
- 239000010409 thin film Substances 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000004544 sputter deposition Methods 0.000 claims abstract description 11
- 230000003068 static effect Effects 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 7
- 239000000696 magnetic material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 5
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract description 3
- 230000005389 magnetism Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 10
- 239000010410 layer Substances 0.000 description 10
- 230000005415 magnetization Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26726385A JPS62128109A (ja) | 1985-11-29 | 1985-11-29 | 高透磁率積層膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26726385A JPS62128109A (ja) | 1985-11-29 | 1985-11-29 | 高透磁率積層膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62128109A true JPS62128109A (ja) | 1987-06-10 |
| JPH0560641B2 JPH0560641B2 (enrdf_load_stackoverflow) | 1993-09-02 |
Family
ID=17442412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26726385A Granted JPS62128109A (ja) | 1985-11-29 | 1985-11-29 | 高透磁率積層膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128109A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0547555A (ja) * | 1991-08-19 | 1993-02-26 | Amorphous Denshi Device Kenkyusho:Kk | 非晶質軟磁性多層薄膜及びその製造方法 |
| JPH0722235A (ja) * | 1991-08-14 | 1995-01-24 | Internatl Business Mach Corp <Ibm> | 同一材料を使用する多層化強磁性体の薄膜及び磁気ヘッド |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5410997A (en) * | 1977-06-24 | 1979-01-26 | Ibm | Magnetic thin film structure |
| JPS58185742A (ja) * | 1982-04-21 | 1983-10-29 | Showa Denko Kk | 非晶質磁性合金および磁性材料 |
| JPS5921008A (ja) * | 1983-02-18 | 1984-02-02 | Sumitomo Special Metals Co Ltd | 複合基板 |
| JPS59126776A (ja) * | 1982-12-28 | 1984-07-21 | Fujitsu Ltd | スパツタ方法 |
-
1985
- 1985-11-29 JP JP26726385A patent/JPS62128109A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5410997A (en) * | 1977-06-24 | 1979-01-26 | Ibm | Magnetic thin film structure |
| JPS58185742A (ja) * | 1982-04-21 | 1983-10-29 | Showa Denko Kk | 非晶質磁性合金および磁性材料 |
| JPS59126776A (ja) * | 1982-12-28 | 1984-07-21 | Fujitsu Ltd | スパツタ方法 |
| JPS5921008A (ja) * | 1983-02-18 | 1984-02-02 | Sumitomo Special Metals Co Ltd | 複合基板 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722235A (ja) * | 1991-08-14 | 1995-01-24 | Internatl Business Mach Corp <Ibm> | 同一材料を使用する多層化強磁性体の薄膜及び磁気ヘッド |
| JPH0547555A (ja) * | 1991-08-19 | 1993-02-26 | Amorphous Denshi Device Kenkyusho:Kk | 非晶質軟磁性多層薄膜及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0560641B2 (enrdf_load_stackoverflow) | 1993-09-02 |
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