Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric CorpfiledCriticalMitsubishi Electric Corp
Priority to JP3593680ApriorityCriticalpatent/JPS56130751A/ja
Publication of JPS56130751ApublicationCriticalpatent/JPS56130751A/ja
Publication of JPS6212502B2publicationCriticalpatent/JPS6212502B2/ja
G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
G03F1/80—Etching
Landscapes
Physics & Mathematics
(AREA)
General Physics & Mathematics
(AREA)
Preparing Plates And Mask In Photomechanical Process
(AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials
(AREA)
Drying Of Semiconductors
(AREA)
JP3593680A1980-03-181980-03-18Manufacture of mask
GrantedJPS56130751A
(en)