JPS6212464B2 - - Google Patents

Info

Publication number
JPS6212464B2
JPS6212464B2 JP52109046A JP10904677A JPS6212464B2 JP S6212464 B2 JPS6212464 B2 JP S6212464B2 JP 52109046 A JP52109046 A JP 52109046A JP 10904677 A JP10904677 A JP 10904677A JP S6212464 B2 JPS6212464 B2 JP S6212464B2
Authority
JP
Japan
Prior art keywords
sample
particle beam
mass spectrometer
slit
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52109046A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5442196A (en
Inventor
Masabumi Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10904677A priority Critical patent/JPS5442196A/ja
Publication of JPS5442196A publication Critical patent/JPS5442196A/ja
Publication of JPS6212464B2 publication Critical patent/JPS6212464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP10904677A 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams Granted JPS5442196A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10904677A JPS5442196A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10904677A JPS5442196A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Publications (2)

Publication Number Publication Date
JPS5442196A JPS5442196A (en) 1979-04-03
JPS6212464B2 true JPS6212464B2 (enrdf_load_stackoverflow) 1987-03-18

Family

ID=14500226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10904677A Granted JPS5442196A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Country Status (1)

Country Link
JP (1) JPS5442196A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6245648U (enrdf_load_stackoverflow) * 1985-09-09 1987-03-19
JPS63162269U (enrdf_load_stackoverflow) * 1987-04-13 1988-10-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6245648U (enrdf_load_stackoverflow) * 1985-09-09 1987-03-19
JPS63162269U (enrdf_load_stackoverflow) * 1987-04-13 1988-10-24

Also Published As

Publication number Publication date
JPS5442196A (en) 1979-04-03

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