JPS5442196A - Sample analyzing apparatus by charged particle beams - Google Patents

Sample analyzing apparatus by charged particle beams

Info

Publication number
JPS5442196A
JPS5442196A JP10904677A JP10904677A JPS5442196A JP S5442196 A JPS5442196 A JP S5442196A JP 10904677 A JP10904677 A JP 10904677A JP 10904677 A JP10904677 A JP 10904677A JP S5442196 A JPS5442196 A JP S5442196A
Authority
JP
Japan
Prior art keywords
charged particle
analyzing apparatus
particle beams
sample analyzing
common use
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10904677A
Other languages
Japanese (ja)
Other versions
JPS6212464B2 (en
Inventor
Masabumi Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10904677A priority Critical patent/JPS5442196A/en
Publication of JPS5442196A publication Critical patent/JPS5442196A/en
Publication of JPS6212464B2 publication Critical patent/JPS6212464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To simplify the constitution of the entire part of the apparatus by making common use of respective charged particle detectors for energy analyzing apparatus and mass spectrograph with one detector and also making common use of the outlet slit of the energy analysing apparatus and the inlet slit of the mass spectrograph with one.
JP10904677A 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams Granted JPS5442196A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10904677A JPS5442196A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10904677A JPS5442196A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Publications (2)

Publication Number Publication Date
JPS5442196A true JPS5442196A (en) 1979-04-03
JPS6212464B2 JPS6212464B2 (en) 1987-03-18

Family

ID=14500226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10904677A Granted JPS5442196A (en) 1977-09-09 1977-09-09 Sample analyzing apparatus by charged particle beams

Country Status (1)

Country Link
JP (1) JPS5442196A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6245648U (en) * 1985-09-09 1987-03-19
JPS63162269U (en) * 1987-04-13 1988-10-24

Also Published As

Publication number Publication date
JPS6212464B2 (en) 1987-03-18

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