JPH0547933B2 - - Google Patents

Info

Publication number
JPH0547933B2
JPH0547933B2 JP58076678A JP7667883A JPH0547933B2 JP H0547933 B2 JPH0547933 B2 JP H0547933B2 JP 58076678 A JP58076678 A JP 58076678A JP 7667883 A JP7667883 A JP 7667883A JP H0547933 B2 JPH0547933 B2 JP H0547933B2
Authority
JP
Japan
Prior art keywords
ion
ions
sample surface
sample
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58076678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59201357A (ja
Inventor
Hiroshi Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP58076678A priority Critical patent/JPS59201357A/ja
Publication of JPS59201357A publication Critical patent/JPS59201357A/ja
Publication of JPH0547933B2 publication Critical patent/JPH0547933B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58076678A 1983-04-30 1983-04-30 二次イオン質量分析計 Granted JPS59201357A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58076678A JPS59201357A (ja) 1983-04-30 1983-04-30 二次イオン質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58076678A JPS59201357A (ja) 1983-04-30 1983-04-30 二次イオン質量分析計

Publications (2)

Publication Number Publication Date
JPS59201357A JPS59201357A (ja) 1984-11-14
JPH0547933B2 true JPH0547933B2 (enrdf_load_stackoverflow) 1993-07-20

Family

ID=13612086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58076678A Granted JPS59201357A (ja) 1983-04-30 1983-04-30 二次イオン質量分析計

Country Status (1)

Country Link
JP (1) JPS59201357A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010001346B4 (de) * 2010-01-28 2014-05-08 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät und Verfahren zum Betreiben eines Teilchenstrahlgeräts

Also Published As

Publication number Publication date
JPS59201357A (ja) 1984-11-14

Similar Documents

Publication Publication Date Title
US3517191A (en) Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US3845305A (en) Microbeam probe apparatus
US5008537A (en) Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
US3889115A (en) Ion microanalyzer
US3617739A (en) Ion lens to provide a focused ion, or ion and electron beam at a target, particularly for ion microprobe apparatus
EP0084850B1 (en) Apparatus for irradiation with charged particle beams
US3733483A (en) Electron spectroscopy
US4107527A (en) Ion-emission microanalyzer microscope
JPH0547933B2 (enrdf_load_stackoverflow)
US4219730A (en) Charge-particle energy analyzer
JPH0378739B2 (enrdf_load_stackoverflow)
JPS5811569B2 (ja) デンシブンコウソウチ
EP0190251B1 (en) Method and apparatus for the micro-analysis or imaging of samples
JPH01296555A (ja) 集束イオンビーム装置
US5107110A (en) Simultaneous detection type mass spectrometer
JPS6049546A (ja) 複合分析装置
JP3055159B2 (ja) 中性粒子質量分析装置
JP3174307B2 (ja) 二次荷電粒子解析装置、及びそれを用いた試料解析方法
JP3055160B2 (ja) 中性粒子質量分析装置
JPS62167452A (ja) Ｘ線光電子分光装置
JPS58200144A (ja) Ｘ線光電子分光装置
JPH0588502B2 (enrdf_load_stackoverflow)
JPH0341402Y2 (enrdf_load_stackoverflow)
JPS5830695B2 (ja) 荷電粒子分析器
JPS6212464B2 (enrdf_load_stackoverflow)