JPS59201357A - 二次イオン質量分析計 - Google Patents

二次イオン質量分析計

Info

Publication number
JPS59201357A
JPS59201357A JP58076678A JP7667883A JPS59201357A JP S59201357 A JPS59201357 A JP S59201357A JP 58076678 A JP58076678 A JP 58076678A JP 7667883 A JP7667883 A JP 7667883A JP S59201357 A JPS59201357 A JP S59201357A
Authority
JP
Japan
Prior art keywords
ion
ions
sample
mass spectrometer
analysis means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58076678A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547933B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yamauchi
洋 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP58076678A priority Critical patent/JPS59201357A/ja
Publication of JPS59201357A publication Critical patent/JPS59201357A/ja
Publication of JPH0547933B2 publication Critical patent/JPH0547933B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58076678A 1983-04-30 1983-04-30 二次イオン質量分析計 Granted JPS59201357A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58076678A JPS59201357A (ja) 1983-04-30 1983-04-30 二次イオン質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58076678A JPS59201357A (ja) 1983-04-30 1983-04-30 二次イオン質量分析計

Publications (2)

Publication Number Publication Date
JPS59201357A true JPS59201357A (ja) 1984-11-14
JPH0547933B2 JPH0547933B2 (enrdf_load_stackoverflow) 1993-07-20

Family

ID=13612086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58076678A Granted JPS59201357A (ja) 1983-04-30 1983-04-30 二次イオン質量分析計

Country Status (1)

Country Link
JP (1) JPS59201357A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2355125A3 (en) * 2010-01-28 2012-04-25 Carl Zeiss NTS GmbH Particle beam device and method for operation of a particle beam device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2355125A3 (en) * 2010-01-28 2012-04-25 Carl Zeiss NTS GmbH Particle beam device and method for operation of a particle beam device

Also Published As

Publication number Publication date
JPH0547933B2 (enrdf_load_stackoverflow) 1993-07-20

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