JPS62123099A - 熱分解気相成長方法 - Google Patents
熱分解気相成長方法Info
- Publication number
- JPS62123099A JPS62123099A JP25968985A JP25968985A JPS62123099A JP S62123099 A JPS62123099 A JP S62123099A JP 25968985 A JP25968985 A JP 25968985A JP 25968985 A JP25968985 A JP 25968985A JP S62123099 A JPS62123099 A JP S62123099A
- Authority
- JP
- Japan
- Prior art keywords
- growth
- diphosphine
- inp
- pyrolytic vapor
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 13
- VURFVHCLMJOLKN-UHFFFAOYSA-N diphosphane Chemical compound PP VURFVHCLMJOLKN-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000013078 crystal Substances 0.000 claims abstract description 16
- 238000001947 vapour-phase growth Methods 0.000 claims abstract description 15
- 150000001875 compounds Chemical class 0.000 claims abstract description 14
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- 229910021478 group 5 element Inorganic materials 0.000 claims abstract 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 239000011574 phosphorus Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 abstract description 13
- 239000007789 gas Substances 0.000 abstract description 10
- 239000002994 raw material Substances 0.000 abstract description 8
- OTRPZROOJRIMKW-UHFFFAOYSA-N triethylindigane Chemical compound CC[In](CC)CC OTRPZROOJRIMKW-UHFFFAOYSA-N 0.000 abstract description 6
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 14
- 238000000354 decomposition reaction Methods 0.000 description 10
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 9
- 238000000197 pyrolysis Methods 0.000 description 8
- 238000005979 thermal decomposition reaction Methods 0.000 description 5
- 240000002329 Inga feuillei Species 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- -1 alkyl compound Chemical class 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25968985A JPS62123099A (ja) | 1985-11-21 | 1985-11-21 | 熱分解気相成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25968985A JPS62123099A (ja) | 1985-11-21 | 1985-11-21 | 熱分解気相成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62123099A true JPS62123099A (ja) | 1987-06-04 |
| JPH0341438B2 JPH0341438B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-06-24 |
Family
ID=17337550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25968985A Granted JPS62123099A (ja) | 1985-11-21 | 1985-11-21 | 熱分解気相成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62123099A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5120676A (en) * | 1990-03-23 | 1992-06-09 | Cvd Incorporated | Use of phosphine and arsine compounds in chemical vapor deposition and chemical doping |
-
1985
- 1985-11-21 JP JP25968985A patent/JPS62123099A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5120676A (en) * | 1990-03-23 | 1992-06-09 | Cvd Incorporated | Use of phosphine and arsine compounds in chemical vapor deposition and chemical doping |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0341438B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-06-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |