JPS62120932A - 静電チヤツク装置 - Google Patents

静電チヤツク装置

Info

Publication number
JPS62120932A
JPS62120932A JP26047885A JP26047885A JPS62120932A JP S62120932 A JPS62120932 A JP S62120932A JP 26047885 A JP26047885 A JP 26047885A JP 26047885 A JP26047885 A JP 26047885A JP S62120932 A JPS62120932 A JP S62120932A
Authority
JP
Japan
Prior art keywords
processed
electrode
piston
chucked
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26047885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220369B2 (enrdf_load_stackoverflow
Inventor
Tsunemasa Tokura
戸倉　常正
Kosuke Oshio
大塩　広介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokuda Seisakusho Co Ltd
Original Assignee
Toshiba Corp
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokuda Seisakusho Co Ltd filed Critical Toshiba Corp
Priority to JP26047885A priority Critical patent/JPS62120932A/ja
Publication of JPS62120932A publication Critical patent/JPS62120932A/ja
Publication of JPH0220369B2 publication Critical patent/JPH0220369B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP26047885A 1985-11-20 1985-11-20 静電チヤツク装置 Granted JPS62120932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26047885A JPS62120932A (ja) 1985-11-20 1985-11-20 静電チヤツク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26047885A JPS62120932A (ja) 1985-11-20 1985-11-20 静電チヤツク装置

Publications (2)

Publication Number Publication Date
JPS62120932A true JPS62120932A (ja) 1987-06-02
JPH0220369B2 JPH0220369B2 (enrdf_load_stackoverflow) 1990-05-09

Family

ID=17348508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26047885A Granted JPS62120932A (ja) 1985-11-20 1985-11-20 静電チヤツク装置

Country Status (1)

Country Link
JP (1) JPS62120932A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03155647A (ja) * 1989-08-08 1991-07-03 Fuji Electric Co Ltd 半導体ウエハ保持装置
JPH07130825A (ja) * 1993-09-10 1995-05-19 Sumitomo Metal Ind Ltd 試料の離脱方法及び該方法に使用する試料保持装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03155647A (ja) * 1989-08-08 1991-07-03 Fuji Electric Co Ltd 半導体ウエハ保持装置
JPH07130825A (ja) * 1993-09-10 1995-05-19 Sumitomo Metal Ind Ltd 試料の離脱方法及び該方法に使用する試料保持装置

Also Published As

Publication number Publication date
JPH0220369B2 (enrdf_load_stackoverflow) 1990-05-09

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