JPS62118428U - - Google Patents

Info

Publication number
JPS62118428U
JPS62118428U JP563486U JP563486U JPS62118428U JP S62118428 U JPS62118428 U JP S62118428U JP 563486 U JP563486 U JP 563486U JP 563486 U JP563486 U JP 563486U JP S62118428 U JPS62118428 U JP S62118428U
Authority
JP
Japan
Prior art keywords
difference
wafer
print gap
calculated
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP563486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0219956Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP563486U priority Critical patent/JPH0219956Y2/ja
Publication of JPS62118428U publication Critical patent/JPS62118428U/ja
Application granted granted Critical
Publication of JPH0219956Y2 publication Critical patent/JPH0219956Y2/ja
Expired legal-status Critical Current

Links

JP563486U 1986-01-18 1986-01-18 Expired JPH0219956Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP563486U JPH0219956Y2 (enrdf_load_stackoverflow) 1986-01-18 1986-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP563486U JPH0219956Y2 (enrdf_load_stackoverflow) 1986-01-18 1986-01-18

Publications (2)

Publication Number Publication Date
JPS62118428U true JPS62118428U (enrdf_load_stackoverflow) 1987-07-28
JPH0219956Y2 JPH0219956Y2 (enrdf_load_stackoverflow) 1990-05-31

Family

ID=30787400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP563486U Expired JPH0219956Y2 (enrdf_load_stackoverflow) 1986-01-18 1986-01-18

Country Status (1)

Country Link
JP (1) JPH0219956Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0219956Y2 (enrdf_load_stackoverflow) 1990-05-31

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