JPS62117246A - 高輝度ｘ線発生用標的 - Google Patents

高輝度ｘ線発生用標的

Info

Publication number
JPS62117246A
JPS62117246A JP60257283A JP25728385A JPS62117246A JP S62117246 A JPS62117246 A JP S62117246A JP 60257283 A JP60257283 A JP 60257283A JP 25728385 A JP25728385 A JP 25728385A JP S62117246 A JPS62117246 A JP S62117246A
Authority
JP
Japan
Prior art keywords
diameter
thin wires
target
ray
converged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60257283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373093B2 (enExample
Inventor
Toshihisa Tomie
敏尚 富江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60257283A priority Critical patent/JPS62117246A/ja
Publication of JPS62117246A publication Critical patent/JPS62117246A/ja
Publication of JPH0373093B2 publication Critical patent/JPH0373093B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60257283A 1985-11-15 1985-11-15 高輝度ｘ線発生用標的 Granted JPS62117246A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60257283A JPS62117246A (ja) 1985-11-15 1985-11-15 高輝度ｘ線発生用標的

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60257283A JPS62117246A (ja) 1985-11-15 1985-11-15 高輝度ｘ線発生用標的

Publications (2)

Publication Number Publication Date
JPS62117246A true JPS62117246A (ja) 1987-05-28
JPH0373093B2 JPH0373093B2 (enExample) 1991-11-20

Family

ID=17304222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60257283A Granted JPS62117246A (ja) 1985-11-15 1985-11-15 高輝度ｘ線発生用標的

Country Status (1)

Country Link
JP (1) JPS62117246A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04275894A (ja) * 1991-02-07 1992-10-01 Mitsubishi Electric Corp 産業ロボットの旋回装置
WO2000019496A1 (en) * 1998-09-28 2000-04-06 Hitachi, Ltd. Laser plasma x-ray generator, semiconductor aligner having the generator, and semiconductor exposure method
JP2004301821A (ja) * 2003-03-19 2004-10-28 Nippon Telegr & Teleph Corp <Ntt> Ｘ線及び高エネルギー粒子発生装置とその発生方法
EP1837897A4 (en) * 2005-01-12 2008-04-16 Nikon Corp LASER PLASMA EUV LIGHT SOURCE, TARGET MEMBER, MANUFACTURING PROCESS FOR A TARGET MEMBER, TARGET PROCESSING METHOD AND EUV EXPOSURE SYSTEM

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143600A (ja) * 1983-11-24 1985-07-29 マツクス・プランク・ゲゼルシヤフト　ツール　フエールデルンク　デア　ビツセンシヤフテン　エー　フアウ ホットプラズマ発生装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143600A (ja) * 1983-11-24 1985-07-29 マツクス・プランク・ゲゼルシヤフト　ツール　フエールデルンク　デア　ビツセンシヤフテン　エー　フアウ ホットプラズマ発生装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04275894A (ja) * 1991-02-07 1992-10-01 Mitsubishi Electric Corp 産業ロボットの旋回装置
WO2000019496A1 (en) * 1998-09-28 2000-04-06 Hitachi, Ltd. Laser plasma x-ray generator, semiconductor aligner having the generator, and semiconductor exposure method
JP2004301821A (ja) * 2003-03-19 2004-10-28 Nippon Telegr & Teleph Corp <Ntt> Ｘ線及び高エネルギー粒子発生装置とその発生方法
EP1837897A4 (en) * 2005-01-12 2008-04-16 Nikon Corp LASER PLASMA EUV LIGHT SOURCE, TARGET MEMBER, MANUFACTURING PROCESS FOR A TARGET MEMBER, TARGET PROCESSING METHOD AND EUV EXPOSURE SYSTEM
US7456417B2 (en) 2005-01-12 2008-11-25 Nikon Corporation Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device

Also Published As

Publication number Publication date
JPH0373093B2 (enExample) 1991-11-20

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Legal Events

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