JPS6211244A - 恒温槽の循環装置 - Google Patents

恒温槽の循環装置

Info

Publication number
JPS6211244A
JPS6211244A JP60145834A JP14583485A JPS6211244A JP S6211244 A JPS6211244 A JP S6211244A JP 60145834 A JP60145834 A JP 60145834A JP 14583485 A JP14583485 A JP 14583485A JP S6211244 A JPS6211244 A JP S6211244A
Authority
JP
Japan
Prior art keywords
fan
arrow
air
flow path
constant temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60145834A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546700B2 (enExample
Inventor
Hikari Okitsu
興津　光
Toyoaki Kobayashi
小林　豊晶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60145834A priority Critical patent/JPS6211244A/ja
Publication of JPS6211244A publication Critical patent/JPS6211244A/ja
Publication of JPH0546700B2 publication Critical patent/JPH0546700B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP60145834A 1985-07-04 1985-07-04 恒温槽の循環装置 Granted JPS6211244A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60145834A JPS6211244A (ja) 1985-07-04 1985-07-04 恒温槽の循環装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60145834A JPS6211244A (ja) 1985-07-04 1985-07-04 恒温槽の循環装置

Publications (2)

Publication Number Publication Date
JPS6211244A true JPS6211244A (ja) 1987-01-20
JPH0546700B2 JPH0546700B2 (enExample) 1993-07-14

Family

ID=15394185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60145834A Granted JPS6211244A (ja) 1985-07-04 1985-07-04 恒温槽の循環装置

Country Status (1)

Country Link
JP (1) JPS6211244A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0429882U (enExample) * 1990-06-29 1992-03-10
JPH0534405A (ja) * 1991-07-31 1993-02-09 Hitachi Electron Eng Co Ltd Ｉｃハンドラの温度制御方式

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9627148B2 (en) 2013-03-18 2017-04-18 Kyocera Corporation All-solid-state capacitor
US9916937B2 (en) 2013-10-18 2018-03-13 Kyocera Corporation All-solid-state capacitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0429882U (enExample) * 1990-06-29 1992-03-10
JPH0534405A (ja) * 1991-07-31 1993-02-09 Hitachi Electron Eng Co Ltd Ｉｃハンドラの温度制御方式

Also Published As

Publication number Publication date
JPH0546700B2 (enExample) 1993-07-14

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