JPS62111489A - エキシマレ−ザ装置 - Google Patents

エキシマレ−ザ装置

Info

Publication number
JPS62111489A
JPS62111489A JP60251335A JP25133585A JPS62111489A JP S62111489 A JPS62111489 A JP S62111489A JP 60251335 A JP60251335 A JP 60251335A JP 25133585 A JP25133585 A JP 25133585A JP S62111489 A JPS62111489 A JP S62111489A
Authority
JP
Japan
Prior art keywords
excimer laser
discharge
ionization
main discharge
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60251335A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573072B2 (enExample
Inventor
Naoya Horiuchi
直也 堀内
Takuhiro Ono
小野　拓弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60251335A priority Critical patent/JPS62111489A/ja
Publication of JPS62111489A publication Critical patent/JPS62111489A/ja
Publication of JPH0573072B2 publication Critical patent/JPH0573072B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
JP60251335A 1985-11-08 1985-11-08 エキシマレ−ザ装置 Granted JPS62111489A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60251335A JPS62111489A (ja) 1985-11-08 1985-11-08 エキシマレ−ザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60251335A JPS62111489A (ja) 1985-11-08 1985-11-08 エキシマレ−ザ装置

Publications (2)

Publication Number Publication Date
JPS62111489A true JPS62111489A (ja) 1987-05-22
JPH0573072B2 JPH0573072B2 (enExample) 1993-10-13

Family

ID=17221292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60251335A Granted JPS62111489A (ja) 1985-11-08 1985-11-08 エキシマレ−ザ装置

Country Status (1)

Country Link
JP (1) JPS62111489A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7123872B2 (en) 2002-09-11 2006-10-17 Ricoh Company, Ltd. Cleaning device and method, image forming apparatus, and process cartridge

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7123872B2 (en) 2002-09-11 2006-10-17 Ricoh Company, Ltd. Cleaning device and method, image forming apparatus, and process cartridge

Also Published As

Publication number Publication date
JPH0573072B2 (enExample) 1993-10-13

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