JPS62111426A - フオトレジストの処理方法 - Google Patents

フオトレジストの処理方法

Info

Publication number
JPS62111426A
JPS62111426A JP23945685A JP23945685A JPS62111426A JP S62111426 A JPS62111426 A JP S62111426A JP 23945685 A JP23945685 A JP 23945685A JP 23945685 A JP23945685 A JP 23945685A JP S62111426 A JPS62111426 A JP S62111426A
Authority
JP
Japan
Prior art keywords
photoresist
ultraviolet rays
wavelength
lamp
mercury lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23945685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410733B2 (enExample
Inventor
Tetsuharu Arai
荒井　徹治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP23945685A priority Critical patent/JPS62111426A/ja
Publication of JPS62111426A publication Critical patent/JPS62111426A/ja
Publication of JPH0410733B2 publication Critical patent/JPH0410733B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP23945685A 1985-10-28 1985-10-28 フオトレジストの処理方法 Granted JPS62111426A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23945685A JPS62111426A (ja) 1985-10-28 1985-10-28 フオトレジストの処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23945685A JPS62111426A (ja) 1985-10-28 1985-10-28 フオトレジストの処理方法

Publications (2)

Publication Number Publication Date
JPS62111426A true JPS62111426A (ja) 1987-05-22
JPH0410733B2 JPH0410733B2 (enExample) 1992-02-26

Family

ID=17045032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23945685A Granted JPS62111426A (ja) 1985-10-28 1985-10-28 フオトレジストの処理方法

Country Status (1)

Country Link
JP (1) JPS62111426A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897287A (en) * 1988-10-06 1990-01-30 The Boc Group, Inc. Metallization process for an integrated circuit
JP2019199392A (ja) * 2018-05-18 2019-11-21 日本電気硝子株式会社 膜付きガラス板及びパッケージ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51111072A (en) * 1975-03-26 1976-10-01 Hitachi Ltd Photo etching method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51111072A (en) * 1975-03-26 1976-10-01 Hitachi Ltd Photo etching method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897287A (en) * 1988-10-06 1990-01-30 The Boc Group, Inc. Metallization process for an integrated circuit
JP2019199392A (ja) * 2018-05-18 2019-11-21 日本電気硝子株式会社 膜付きガラス板及びパッケージ

Also Published As

Publication number Publication date
JPH0410733B2 (enExample) 1992-02-26

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Legal Events

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