JPS6211139A - 異物検査装置 - Google Patents

異物検査装置

Info

Publication number
JPS6211139A
JPS6211139A JP60140148A JP14014885A JPS6211139A JP S6211139 A JPS6211139 A JP S6211139A JP 60140148 A JP60140148 A JP 60140148A JP 14014885 A JP14014885 A JP 14014885A JP S6211139 A JPS6211139 A JP S6211139A
Authority
JP
Japan
Prior art keywords
foreign matter
foreign object
foreign
information
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60140148A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0375055B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Taniuchi
谷内　俊明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60140148A priority Critical patent/JPS6211139A/ja
Publication of JPS6211139A publication Critical patent/JPS6211139A/ja
Publication of JPH0375055B2 publication Critical patent/JPH0375055B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP60140148A 1985-06-28 1985-06-28 異物検査装置 Granted JPS6211139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60140148A JPS6211139A (ja) 1985-06-28 1985-06-28 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140148A JPS6211139A (ja) 1985-06-28 1985-06-28 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6211139A true JPS6211139A (ja) 1987-01-20
JPH0375055B2 JPH0375055B2 (enrdf_load_stackoverflow) 1991-11-28

Family

ID=15261986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60140148A Granted JPS6211139A (ja) 1985-06-28 1985-06-28 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6211139A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0354064U (enrdf_load_stackoverflow) * 1989-09-27 1991-05-24
JP2014052219A (ja) * 2012-09-05 2014-03-20 Dainippon Printing Co Ltd 異物検査装置、異物検査方法
JP2015111161A (ja) * 2015-03-17 2015-06-18 大日本印刷株式会社 異物検査装置、異物検査方法
WO2025057769A1 (ja) * 2023-09-14 2025-03-20 学校法人関西学院 基板の評価方法、基板の評価装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0354064U (enrdf_load_stackoverflow) * 1989-09-27 1991-05-24
JP2014052219A (ja) * 2012-09-05 2014-03-20 Dainippon Printing Co Ltd 異物検査装置、異物検査方法
JP2015111161A (ja) * 2015-03-17 2015-06-18 大日本印刷株式会社 異物検査装置、異物検査方法
WO2025057769A1 (ja) * 2023-09-14 2025-03-20 学校法人関西学院 基板の評価方法、基板の評価装置

Also Published As

Publication number Publication date
JPH0375055B2 (enrdf_load_stackoverflow) 1991-11-28

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Legal Events

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