JPS6211002Y2 - - Google Patents
Info
- Publication number
- JPS6211002Y2 JPS6211002Y2 JP14266682U JP14266682U JPS6211002Y2 JP S6211002 Y2 JPS6211002 Y2 JP S6211002Y2 JP 14266682 U JP14266682 U JP 14266682U JP 14266682 U JP14266682 U JP 14266682U JP S6211002 Y2 JPS6211002 Y2 JP S6211002Y2
- Authority
- JP
- Japan
- Prior art keywords
- claw
- wafer
- guide groove
- guide
- mechanical chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 210000000078 claw Anatomy 0.000 claims description 47
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 31
- 230000000694 effects Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14266682U JPS5948053U (ja) | 1982-09-22 | 1982-09-22 | メカニカルチヤツク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14266682U JPS5948053U (ja) | 1982-09-22 | 1982-09-22 | メカニカルチヤツク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5948053U JPS5948053U (ja) | 1984-03-30 |
| JPS6211002Y2 true JPS6211002Y2 (en, 2012) | 1987-03-16 |
Family
ID=30318703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14266682U Granted JPS5948053U (ja) | 1982-09-22 | 1982-09-22 | メカニカルチヤツク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5948053U (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010253624A (ja) * | 2009-04-27 | 2010-11-11 | Ihi Corp | ワーク設置装置とワーク設置方法 |
-
1982
- 1982-09-22 JP JP14266682U patent/JPS5948053U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5948053U (ja) | 1984-03-30 |
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