JPS6196609A - 透明導電膜 - Google Patents
透明導電膜Info
- Publication number
- JPS6196609A JPS6196609A JP21703184A JP21703184A JPS6196609A JP S6196609 A JPS6196609 A JP S6196609A JP 21703184 A JP21703184 A JP 21703184A JP 21703184 A JP21703184 A JP 21703184A JP S6196609 A JPS6196609 A JP S6196609A
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- film
- resistivity
- zno
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 239000011701 zinc Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 description 9
- 239000002994 raw material Substances 0.000 description 9
- 239000011787 zinc oxide Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical group [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Conductive Materials (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21703184A JPS6196609A (ja) | 1984-10-15 | 1984-10-15 | 透明導電膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21703184A JPS6196609A (ja) | 1984-10-15 | 1984-10-15 | 透明導電膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6196609A true JPS6196609A (ja) | 1986-05-15 |
| JPH04929B2 JPH04929B2 (enrdf_load_stackoverflow) | 1992-01-09 |
Family
ID=16697750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21703184A Granted JPS6196609A (ja) | 1984-10-15 | 1984-10-15 | 透明導電膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196609A (enrdf_load_stackoverflow) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62122011A (ja) * | 1985-11-22 | 1987-06-03 | 株式会社リコー | 透明導電膜の製造方法 |
| JPH01201021A (ja) * | 1988-02-04 | 1989-08-14 | Bridgestone Corp | 熱線遮蔽材料及び熱線遮蔽ガラス |
| US5470618A (en) * | 1988-09-22 | 1995-11-28 | Nippon Soken, Inc. | Method of making zinc-based transparent conductive film |
| WO2005081265A1 (ja) * | 2004-02-24 | 2005-09-01 | Ulvac, Inc. | 透明導電膜形成用分散液、透明導電膜の形成方法及び透明電極 |
| JP2007280910A (ja) * | 2006-04-03 | 2007-10-25 | Ind Technol Res Inst | 金属ナノ粒子を含むアルミニウム添加亜鉛酸化物透明導電膜とその製造方法 |
| JP2008115425A (ja) * | 2006-11-06 | 2008-05-22 | Mitsubishi Materials Corp | 透明導電膜形成用スパッタリングターゲット |
| US7651640B2 (en) | 2005-02-24 | 2010-01-26 | Sekisui Chemical Co., Ltd. | Gallium containing zinc oxide |
| JP2010192441A (ja) * | 2009-02-17 | 2010-09-02 | Samsung Mobile Display Co Ltd | 有機発光素子及びその製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7867636B2 (en) * | 2006-01-11 | 2011-01-11 | Murata Manufacturing Co., Ltd. | Transparent conductive film and method for manufacturing the same |
| US20100047590A1 (en) | 2006-10-06 | 2010-02-25 | Emi Ueda | Ultra-fine zinc oxide particle and method for producing thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023918A (enrdf_load_stackoverflow) * | 1973-07-02 | 1975-03-14 | ||
| JPS5519896A (en) * | 1978-07-21 | 1980-02-12 | Stout Glenn M | Capsule filled hall effect device |
-
1984
- 1984-10-15 JP JP21703184A patent/JPS6196609A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023918A (enrdf_load_stackoverflow) * | 1973-07-02 | 1975-03-14 | ||
| JPS5519896A (en) * | 1978-07-21 | 1980-02-12 | Stout Glenn M | Capsule filled hall effect device |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62122011A (ja) * | 1985-11-22 | 1987-06-03 | 株式会社リコー | 透明導電膜の製造方法 |
| JPH01201021A (ja) * | 1988-02-04 | 1989-08-14 | Bridgestone Corp | 熱線遮蔽材料及び熱線遮蔽ガラス |
| US5470618A (en) * | 1988-09-22 | 1995-11-28 | Nippon Soken, Inc. | Method of making zinc-based transparent conductive film |
| WO2005081265A1 (ja) * | 2004-02-24 | 2005-09-01 | Ulvac, Inc. | 透明導電膜形成用分散液、透明導電膜の形成方法及び透明電極 |
| US7651640B2 (en) | 2005-02-24 | 2010-01-26 | Sekisui Chemical Co., Ltd. | Gallium containing zinc oxide |
| JP2007280910A (ja) * | 2006-04-03 | 2007-10-25 | Ind Technol Res Inst | 金属ナノ粒子を含むアルミニウム添加亜鉛酸化物透明導電膜とその製造方法 |
| JP2008115425A (ja) * | 2006-11-06 | 2008-05-22 | Mitsubishi Materials Corp | 透明導電膜形成用スパッタリングターゲット |
| JP2010192441A (ja) * | 2009-02-17 | 2010-09-02 | Samsung Mobile Display Co Ltd | 有機発光素子及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04929B2 (enrdf_load_stackoverflow) | 1992-01-09 |
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