JPS6190243U - - Google Patents
Info
- Publication number
- JPS6190243U JPS6190243U JP17522384U JP17522384U JPS6190243U JP S6190243 U JPS6190243 U JP S6190243U JP 17522384 U JP17522384 U JP 17522384U JP 17522384 U JP17522384 U JP 17522384U JP S6190243 U JPS6190243 U JP S6190243U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- waxless
- workpiece
- polishing
- held
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 239000004744 fabric Substances 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17522384U JPS6190243U (en:Method) | 1984-11-19 | 1984-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17522384U JPS6190243U (en:Method) | 1984-11-19 | 1984-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190243U true JPS6190243U (en:Method) | 1986-06-12 |
Family
ID=30732827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17522384U Pending JPS6190243U (en:Method) | 1984-11-19 | 1984-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190243U (en:Method) |
-
1984
- 1984-11-19 JP JP17522384U patent/JPS6190243U/ja active Pending
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